MEMS high-doses radiation sensor

Augustyniak, I.; Dziuban, Jan; Knapkiewicz, Paweł; Matusiak, M.; Olszacki, M.; Pons, Patrick

doi:10.1109/transducers.2013.6627066

Cited by 15 publications

(8 citation statements)

References 4 publications

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“…Currently, 436 nuclear power reactors in thirty countries are commissioned, and another sixty‐two are being installed. [ 10 ] Several reports in the literature discuss the luminescence studies of aluminate‐based nanophosphors. Few researchers have, however, identified Mg 0.65 Zn 0.3 Al 2 O 4 :0.05Dy as a TL material for high radiation dosimetry.…”

Section: Introductionmentioning

confidence: 99%

Thermoluminescence Studies of High Energy X‐Rays Irradiated Dy³⁺ Doped Mg_0.65Zn_0.3Al₂O₄:0.05Dy Nanophosphor

Pathak,

Singh,

Mishra

et al. 2023

Cryst. Res. Technol.

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The solution combustion synthesis method is employed to prepare Magnesium, Zinc, Aluminate doped with dysprosium (Dy3+) using the general formula Mg(1‐x‐y) Zn(y)Al2O4:xDy (x = 0.05 and y = 0.3 mol%). From X‐ray diffraction studies, the crystal structure belongs to a cubic close‐packed spinel structure with space group Fd3ˉm and an average crystallite size is 26.18 nm. In the Fourier transform infrared spectra, the peaks at 683.69 cm−1, 503.12 cm−1 correspond to the AlO6 groups. The peak temperature (Tm) from the Thermoluminescent glow curve is recorded at 235°C, 237°C, and 235°C, at irradiation doses of 600 Gy, 800 Gy, and 1000 Gy, respectively. The kinetic parameters are evaluated from the thermoluminescent glow curve by calculating the activation energy (E), order of kinetics (b), and frequency factor (s−1). Nanophosphor Mg0.65Zn0.3Al2O4:0.05Dy shows sub linear dose relationship at doses 600–675 Gy and 925–1000 Gy. Further, at doses between 675 and 925 Gy, it shows a super linear relationship. The optimum activation energy (E) of 0.77–0.82 eV and negligible fading make it suitable for high radiation thermoluminescent dosimetry.

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Section: Introductionmentioning

confidence: 99%

Thermoluminescence Studies of High Energy X‐Rays Irradiated Dy³⁺ Doped Mg_0.65Zn_0.3Al₂O₄:0.05Dy Nanophosphor

Pathak,

Singh,

Mishra

et al. 2023

Cryst. Res. Technol.

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“…Microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) devices have been extensively used as physical sensors for measurement of various physical parameters including acceleration, mass, pressure, temperature, strain, and radiation [ 16 , 17 , 18 , 19 , 20 , 21 , 22 ]. They have also been utilized in recent years for detection of chemical and biological analytes utilizing functionalized surfaces [ 23 ].…”

Section: Introductionmentioning

confidence: 99%

Photoacoustic Detection of H2 and NH3 Using Plasmonic Signal Enhancement in GaN Microcantilevers

Khan

Bayram

et al. 2020

Micromachines

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Photoacoustic (PA) detection of H2 and NH3 using plasmonic excitation in Pt- and Pd-decorated GaN piezotransistive microcantilevers were investigated using pulsed 520-nm laser illumination. The sensing performances of 1-nm Pt and Pd nanoparticle (NP) deposited cantilever devices were compared, of which the Pd-coated sensor devices exhibited consistently better sensing performance, with lower limit of detection and superior signal-to-noise ratio (SNR) values, compared to the Pt-coated devices. Among the two functionalization layers, Pd-coated devices were found to respond only to H2 exposure and not to NH3, while Pt-coated devices exhibited repeatable response to both H2 and NH3 exposures, highlighting the potential of the former in performing selective detection between these reducing gases. Optimization of the device-biasing conditions were found to enhance the detection sensitivity of the sensors.

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“…The anodically bonded structures are characterized by high bond strength [15], high chemical resistance [4] and gas tightness [16][17][18]. For these reasons, this method was used for the fabrication of main elements for a new family of high radiation MEMS sensors [19].…”

Section: Introductionmentioning

confidence: 99%

Sealing of silicon-glass microcavities with polymer filling

Knapkiewicz¹,

Augustyniak²

2016

Bulletin of the Polish Academy of Sciences Technical Sciences

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Abstract. Investigation of hermetic sealing of selected polymers in silicon-glass microcavities has been presented. The anodic bonding method has been adapted for hermetic encapsulation of the polymer in microcavity. According to standard conditions of the anodic bonding process (temperature: 400°C, voltage: 1000 V), the main challenge was the significant reduction of temperature in order to avoid degradation of the polymer. An analysis of the influence of reduced temperature and oxygen-free atmosphere on bond quality has been done. Proper parameters of the anodic bonding process enabling good and hermetic encapsulation of the polymer in the microcavity as well as optimal polymer treatment have been elaborated. Studies have shown that the closure of high density polyethylene in microcavity by anodic bonding process at a temperature reduced to 340°C is possible. This procedure will be used for the fabrication of main elements for a new family of high radiation MEMS sensors.Key words: anodic bonding, polymer filling, sealing of silicon and glass.Sealing of silicon-glass microcavities with polymer filling P. KNAPKIEWICZ* and I. AUGUSTYNIAK Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, 11/17 Janiszewskiego St., 50-372 Wrocław, Poland in presence of polymer, reduced temperature and oxygen-free atmosphere is necessary and is the main subject of this article. The technology developed and described here opens the way to fabricate MEMS sensors of high level of radiation. The development of high radiation MEMS sensor, including sensor technology and radiation tests, is presented in [21]. Technical analysis2.1. Anodic bonding process. The direct silicon-to-glass anodic bonding is a direct sealing process in which a stable chemical bond between bonded materials is obtained. The anodic bonding process is a complicated chemical reaction, which has been shown in three main steps (Fig. 1) [22]:• generation of electrostatic force by applied voltage -initiation of joining substrates, • formation of depleted layer in glass by sodium ion current, • formation of Si-O chemical bond.

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MEMS high-doses radiation sensor

Cited by 15 publications

References 4 publications

Thermoluminescence Studies of High Energy X‐Rays Irradiated Dy³⁺ Doped Mg_0.65Zn_0.3Al₂O₄:0.05Dy Nanophosphor

Thermoluminescence Studies of High Energy X‐Rays Irradiated Dy³⁺ Doped Mg_0.65Zn_0.3Al₂O₄:0.05Dy Nanophosphor

Photoacoustic Detection of H2 and NH3 Using Plasmonic Signal Enhancement in GaN Microcantilevers

Sealing of silicon-glass microcavities with polymer filling

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MEMS high-doses radiation sensor

Cited by 15 publications

References 4 publications

Thermoluminescence Studies of High Energy X‐Rays Irradiated Dy3+ Doped Mg0.65Zn0.3Al2O4:0.05Dy Nanophosphor

Thermoluminescence Studies of High Energy X‐Rays Irradiated Dy3+ Doped Mg0.65Zn0.3Al2O4:0.05Dy Nanophosphor

Photoacoustic Detection of H2 and NH3 Using Plasmonic Signal Enhancement in GaN Microcantilevers

Sealing of silicon-glass microcavities with polymer filling

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Thermoluminescence Studies of High Energy X‐Rays Irradiated Dy³⁺ Doped Mg_0.65Zn_0.3Al₂O₄:0.05Dy Nanophosphor

Thermoluminescence Studies of High Energy X‐Rays Irradiated Dy³⁺ Doped Mg_0.65Zn_0.3Al₂O₄:0.05Dy Nanophosphor