MEMS Micro-glassblowing Paradigm for Wafer-level Fabrication of Fused Silica Wineglass Gyroscopes

Senkal, Doruk; Ahamed, Mohammed Jalal; Askari, Sina; Shkel, Andrei M.

doi:10.1016/j.proeng.2014.11.580

Cited by 28 publications

(13 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, fabrication of thin films of thickness at the micrometer or nanometer level from silicate‐based glass by glassblowing with a blowpipe has not been reported thus far. Arrays of silicate‐based glass shells were simultaneously fabricated on a wafer in a unique manner that is unlike the traditional method of blowing with a pipe. A glass film was stuck on the silicon wafer with holes and was then heated to soften the glass film covering the holes.…”

Section: Discussionmentioning

confidence: 99%

Optical bonding of tellurite glass film on silicate glass

Jeng

Kishi

Matsushita

et al. 2019

Int J of Appl Glass Sci

View full text Add to dashboard Cite

Tellurite glass thin film was successfully bonded on a silicate glass substrate by the direct-bonding (DB) method. Glass film (thickness 1-3 μm) was fabricated by the glassblowing technique and the DB process was performed at room temperature at relative humidity (RH) of 62% or 15%. The surface adhesive strengths of the glass films bonded at 15% and 62% RH were measured as 250 and 96 mJ/m 2 , respectively, by the Obreimoff-Metsik method. The hydroxyl (-OH) functional groups on the interface between the film and silicate glass were analyzed by Fourier-transform infrared spectroscopy. The major bonding forces between the tellurite thin film and silicate glass were hydrogen bonds at 62% RH and bonds between Te on the tellurite glass and O on the silicate glass were concerned at 15% RH. These forces, contributed by Si-OH, were important for bond formation at 62%. The large amounts of water and OH groups on the silicate glass, determined by thermogravimetric analysis, indicated a weaker bonding process at 62% RH. This work will contribute toward reliable, high-integrity components for integrated optical circuits, which are increasingly needed for high-throughput data transfer. K E Y W O R D Sadhesive strength, direct bonding, glass thin film, hydroxyl group, tellurite glass

show abstract

Section: Discussionmentioning

confidence: 99%

Optical bonding of tellurite glass film on silicate glass

Jeng

Kishi

Matsushita

et al. 2019

Int J of Appl Glass Sci

View full text Add to dashboard Cite

show abstract

“…Pai et al [ 70 ] discussed three different configurations of electrodes: electrostatic driving/sensing, piezoelectric-enhanced electrostatic driving/electrostatic sensing and electrostatic driving/optical sensing. Senkal et al [ 71 , 72 ] discussed two sets of excitation and detection modes, namely, electrostatic excitation and detection and mechanical pinging and optical pick-up [ 73 ]. Cho et al [ 74 ] compared different electrode integration approaches for HRGs and proposed a method for forming uniform electrodes around an HRG.…”

Section: Theory and Performance Of Hrgmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

View full text Add to dashboard Cite

Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

show abstract

“…The outside surface of the resonator and the main electrodes formed parallel plate capacitors, which were used to excite or detect the displacement of the resonator from different directions. The capacitance for a parallel plate capacitor is [48]:…”

Section: Vibrational Characteristics With Electrostatic Influencementioning

confidence: 99%

“…where ε is the permittivity of the material between two movable plates, S is the area of the plates, d is the actual gap when the resonator vibrates, x0 is the initial gap between two movable plates, and x is the displacement of the bottom plate. A variation in the gap between two movable plates causes a The capacitance for a parallel plate capacitor is [48]:…”

Section: Vibrational Characteristics With Electrostatic Influencementioning

confidence: 99%

Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

Peng

Qiu

Pan

et al. 2020

Sensors

View full text Add to dashboard Cite

The Coriolis Vibratory Gyroscopes are a type of sensors that measure angular velocities through the Coriolis effect. The resonator is the critical component of the CVGs, the vibrational characteristics of which, including the resonant frequency, frequency mismatch, Q factor, and Q factor asymmetry, have a great influence on the performance of CVG. The frequency mismatch and Q factor of the resonator, in particular, directly determine the precision and drift characteristics of the gyroscope. Although the frequency mismatch and Q factor are natural properties of the resonator, they can change with external conditions, such as temperature, pressure, and external forces. In this paper, the influence of electrostatic forces on the vibrational characteristics of the fused silica cylindrical resonator is investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that the resonant frequency, frequency mismatch, and the decay time slightly decreased with electrostatic forces, while the decay time split increased. Lower capacitive gaps and larger applied voltages resulted in lower frequency mismatch and lower decay time. This phenomenon was theoretically analyzed, and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for fused silica cylindrical resonator with electrostatic transduction, the electrostatic influence on the Q factor and frequency, although small, should be considered when designing the capacitive gap and choosing bias voltages.

show abstract

MEMS Micro-glassblowing Paradigm for Wafer-level Fabrication of Fused Silica Wineglass Gyroscopes

Cited by 28 publications

References 8 publications

Optical bonding of tellurite glass film on silicate glass

Optical bonding of tellurite glass film on silicate glass

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

Contact Info

Product

Resources

About