MEMS micro robot using MOSFET based pulse-type hardware neural networks for motion control

Okazaki, Kazuto; Ogiwara, Tatsuya; Takato, Minami; Iiduka, A.; Takahama, Shiho; Fujiwara, Motoyoshi; Saito, Ken; Uchikoba, Fumio

doi:10.1109/memsys.2012.6170370

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“…MEMS devices are widely used with rapid development of MEMS technology. The high precision MEMS sensors such as pressure sensors, accelerometers and gyroscopes [1][2][3] are increasingly applied in micro and nano-fabrication and mechanical automation together with novel robots [3][4][5]. Fast recognition, exact orientation and Stability control are under the main consideration which are all related to the performance of sensors on the robots.…”

Section: Introductionmentioning

confidence: 99%

Accuracy Analysis of Quality Factor Measurement Based on Time Domain Method for MEMS Resonators

Wang

et al. 2014

KEM

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To reduce the measurement cost and time, a time domain measurement method of quality factor for MEMS resonator is presented in this paper. The relation curve between quality factor and vacuum level is obtained. The results indicate that measurement error is larger under high vacuum level when the sampling frequency is lower. The reason causing the error is analyzed and measurement precision is improved by increasing the sampling frequency. The measurement results indicate time domain measurement is advisable and improvable for MEMS resonator measurement.

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