MEMS millimeterwave components

Chiao, J.-C.; Fu, Yiton; Choudhury, Debabani; Lin, L.Y.

doi:10.1109/mwsym.1999.779802

Cited by 12 publications

(1 citation statement)

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“…Nevertheless, the electrostatic micro-actuator has one disadvantage: its relatively high actuation voltage of several tens of volts, which poses a bottleneck preventing its commercialization. In order to reduce this high actuation voltage to a level of several volts, methods such as decreasing the spring constant, increasing the overlap area [13,14], and importing an extra chip to amplify the input voltage have been demonstrated so far [15]. However, even with these methods, other problems still remain (e.g., weak mechanical properties, large associated areas and excessive power consumption from extra chips).…”

Section: Introductionmentioning

confidence: 99%

Electrostatic micro-actuator with a pre-charged series capacitor: modeling, design, and demonstration

Yang

Han

Lee

et al. 2014

J. Micromech. Microeng.

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As a powerful method to reduce actuation voltage in an electrostatic micro-actuator, we propose and investigate an electrostatic micro-actuator with a pre-charged series capacitor. In contrast to a conventional electrostatic actuator, the injected pre-charges into the series capacitor can freely modulate the pull-in voltage of the proposed actuator even after the completion of fabrication. The static characteristics of the proposed actuator were investigated by first developing analytical models based on a parallel-plate capacitor model. We then successfully designed and demonstrated a micro-switch with a pre-charged series capacitor. The pull-in voltage of the fabricated micro-switch was reduced from 65.4 to 0.6 V when pre-charged with 46.3 V. The on-resistance of the fabricated micro-switch was almost the same as the initial one, even when the device was pre-charged, which was demonstrated for the first time. All results from the analytical models, finite element method simulations, and measurements were in good agreement with deviations of less than 10%. This work can be favorably adapted to electrostatic micro-switches which need a low actuation voltage without noticeable degradation of performance.

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Section: Introductionmentioning

confidence: 99%