MEMS mirrors based on a curved concentric electrothermal actuator

Liu, Lin; Pal, Sagnik; Xie, Huikai

doi:10.1016/j.sna.2012.03.021

Cited by 33 publications

(21 citation statements)

References 23 publications

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“…The two-mode capability is useful for different applications. For instance, a tilting micromirror is required in scanning-mode applications: projection displays, optical switches, barcode readers, and biomedical imaging; while a piston micromirror is required in wave characteristics-related applications, such as tunable lasers, spectroscopy, and adaptive optics [116].…”

Section: Applications Of Bimorph Actuatorsmentioning

confidence: 99%

“…A circular or elliptical light beam, as well as the shape of an endoscopic probe, defines the preference for a circular MEMS footprint. Such micromirrors with a circular plate and curved actuators were studied in [116,123]. The maximized area efficiency with non-significant loss in actuation range is highly beneficial for the application.…”

Section: Applications Of Bimorph Actuatorsmentioning

confidence: 99%

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Review of Electrothermal Actuators and Applications

2019

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This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated. The electrothermal actuation method offers several advantages when compared with the other types of actuation approaches based on electrostatic and piezoelectric principles. The electrothermal method offers flexibility in the choice of materials, low-cost fabrication, and large displacement capabilities. The three main configurations of electrothermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph types as well as a few other unconventional actuation approaches. Within each type, trends are outlined from the basic concept and design modifications to applications which have been investigated in order to enhance the performance or to overcome the limitations of the previous designs. It provides a grasp of the actuation methodology, design, and fabrication, and the related performance and applications in cell manipulation, micro assembly, and mechanical testing of nanomaterials, Radio Frequency (RF) switches, and optical Micro-Electro-Mechanical Systems (MEMS).

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Section: Applications Of Bimorph Actuatorsmentioning

confidence: 99%

Section: Applications Of Bimorph Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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“…In many complex microsystems a lot of components should be integrated in a small operation area to perform a precise task such as microrobotic systems [7], actuators, micromirrors [29], cameras, platforms [5], etc. Thus, the force sensor should be as small as possible in order to be able to integrate it in such type of microsystems and in order to perform the measurement as close as possible of the area of interest.…”

Section: Force Sensor Specificationsmentioning

confidence: 99%

Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications

Komati

Agnus

Clevy

et al. 2014

J. Micromech. Microeng.

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In this paper, the prototyping of a new piezoresistive microforce sensor is presented. An original design taking advantage on both mechanical and bulk piezoresistive properties of silicon is presented and enables to easily fabricate a very small, large range, high sensitivity with high integration potential sensor. The sensor is made of two silicon strain gages for which widespread and known microfabrication processes are used. The strain gages present a high gage factor which allow a good sensitivity of this force sensor. The dimensions of this sensor are 700µm in length, 100µm in width and 12µm in thickness. These dimensions make its use convenient with many microscale applications notably its integration in a microgripper. The fabricated sensor is calibrated using an industrial force sensor. The design, microfabrication process, and performances of the fabricated piezoresistive force sensor are innovative thanks to its resolution of 100nN and its measurement range of 2mN. This force sensor presents also a high signal to noise ratio, typically 50dB when a 2mN force is applied at the tip of the force sensor.

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“…Wu et al developed a lateral-shift-free (LSF) electrothermal MEMS mirror with 620 μm vertical displacement at 5.3 V, but the mirror plate experienced a tilting as large as 0.7° [23]. Liu et al proposed a piston MEMS with small tilting by employing a curled concentric electrothermal bimorph actuator (CCBA) design which generated a 200 μm piston range with <0.4° tilting at 0.9 V [24], while Samuelson et al reported a laddered inverted-series-connected (ISC) electrothermal actuator, which showed a 0.25° tilt at 90 µm piston displacement [25]. In addition to improving the structural design, Wu et al attempted to compensate the tilting of the LSF mirror down to 0.06° by optimizing the ratio of the driving voltages, but the usable range was only about 70 μm out of the full 1000 μm [26].…”

Section: Introductionmentioning

confidence: 99%

A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range

Wang

Chen

Živković

et al. 2016

Sensors

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A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror’s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work.

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MEMS mirrors based on a curved concentric electrothermal actuator

Cited by 33 publications

References 23 publications

Review of Electrothermal Actuators and Applications

Review of Electrothermal Actuators and Applications

Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications

A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range

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