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A compact thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported. Thermal bimorphs with integrated platinum resistors are used for generating angular rotation. A finite element thermal model is built and validated using thermal imaging data. Using a Krylov subspace-based algorithm, a reduced-order model of order 2 is extracted from the finite element model. The reduced model agrees well with finite element results. A lumped element circuit model is used to explain the second-order thermal response.

With their large scan range and low drive voltages, electrothermally-actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt angle of an electrothermal bimorph micromirror. The upper limit of the actuation voltage that does not degrade the embedded heater performance has been established.

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