MEMS Piezoelectric Pressure Sensor-modelling and Simulation

Kutiš, Vladimı́r; Dzuba, J.; Paulech, Juraj; Muŕın, Just́ın; Lalinský, T.

doi:10.1016/j.proeng.2012.09.523

Cited by 12 publications

(7 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The relative change in resistance detected is ∼0.005. Vladimír Kuti s et al [11] model a pressure sensor to investigate the effect of the position of electrodes using the piezoelectric principle Eswaran P [12] et al discuss different types of pressure sensors based on the capacitive transduction principle. Meetu Nag et al [13] design a piezoresistive pressure sensor for measurement of tyre pressure.…”

Section: Principle Of Piezoresistive Pressure Sensormentioning

confidence: 99%

See 1 more Smart Citation

Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment

Nag

Pratap

Kumar

2022

Int. J. Simul. Multidisci. Des. Optim.

View full text Add to dashboard Cite

This paper investigates the effect of diaphragm thickness, dimensions of piezoresistors, doping profile and temperature compatibility on sensitivity and non-linearity of graphene MEMS pressure sensor. Taguchi method is used for maximizing the sensitivity and minimizing the nonlinearity of the designed pressure sensor. L27 orthogonal array is utilized for five input factors with three levels. Output voltage is obtained from simulation in COMSOL for different combinations of the input parameters as per L27 orthogonal array. It was found that diaphragm thickness and length of the sensing element shows maximum contribution in increasing the sensitivity of the pressure sensor. Similarly, interaction of diaphragm thickness with piezoresistors thickness and doping concentration shows a major contribution in reducing the non-linearity of the pressure sensor. Other factors such as operating temperature affects both sensitivity and nonlinearity of the pressure sensor with a very low contributing percentage of 0.40% and 2.16%, respectively. Pareto Analysis of variance (ANOVA) was employed to validate the predicated results of the designed pressure sensor. The result indicated that the optimum design shows a sensitivity of 4.10 mV/psi with very low non linearity of 0.1%.

show abstract

Section: Principle Of Piezoresistive Pressure Sensormentioning

confidence: 99%

“…Zhang et al studied the effect of length and doping concentration of silicon nanowire piezoresistors on sensitivity and SNR. They reported that long and thin piezoresistors results in better SNR and sensitivity [11]. Lou et al optimized geometry of silicon nanowires piezoresistors for 0-20 psi pressure for sensitivity [12].…”

Section: Introductionmentioning

confidence: 99%

Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment

Nag

Pratap

Kumar

2022

Int. J. Simul. Multidisci. Des. Optim.

View full text Add to dashboard Cite

show abstract

“…Section 2 indicates the acceleration-induced effect on pressure sensor theoretically. In general, insulation pads and the sensor body of sensors have an insignificant influence on acceleration-induced effects; the diaphragm of sensor is therefore considered when building an ANSYS simulation for the sensor [ 15 , 16 ]. Since the effect of the diaphragm on the quartz crystal can be equivalent to a pressure, we choose only quartz crystal for building the model.…”

Section: Ansys Analysis Of Acceleration-induced Effects Of Piezoelmentioning

confidence: 99%

Modeling and Studying Acceleration-Induced Effects of Piezoelectric Pressure Sensors Using System Identification Theory

2019

Sensors

View full text Add to dashboard Cite

Transient pressure testing is often accompanied by shock acceleration. Aiming at the acceleration-induced effects of pressure sensors, a dynamic compensation method combining empirical mode decomposition (EMD) with system identification theory (SIT) is proposed in this paper. This method is more effective at reducing the error of the acceleration-induced effects without affecting the sensor’s sensitivity and inherent frequency. The principle and theoretical basis of acceleration-induced effects is analyzed, and the static and dynamic acceleration-induced effects on the quartz crystal of a piezoelectric pressure sensor are performed. An acceleration-induced effects dynamic calibration system is built using a Machete hammer, which generates acceleration signals with larger amplitude and narrower pulse width, and an autoregressive exogenous (ARX)mathematical model of acceleration-induced effects is obtained using empirical mode decomposition-system identification theory (EMD-SIT). A digital compensation filter for acceleration-induced effects is designed on the basis of this model. Experimental results explain that the acceleration-induced effects of the pressure sensor were less than 11% after using the digital compensation filter. A series of test data verify the accuracy, reliability, and generality of the model.

show abstract

“…Also it has a confliction between the sensitivity and parasitic capacitance [6]. The piezoelectric sensor requires a relatively strict measuring condition and a complicated circuit [7,8]. The optical fiber grating sensor has the restriction in the installation [9].…”

Section: Introductionmentioning

confidence: 99%

A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure

Zhao

Jiang

et al. 2016

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

MEMS Piezoelectric Pressure Sensor-modelling and Simulation

Cited by 12 publications

References 8 publications

Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment

Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment

Modeling and Studying Acceleration-Induced Effects of Piezoelectric Pressure Sensors Using System Identification Theory

A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure

Contact Info

Product

Resources

About