MEMS Reliability

Li, Jue; Mattila, Toni T.; Vuorinen, Vesa

doi:10.1016/b978-0-323-29965-7.00041-5

Cited by 6 publications

(3 citation statements)

References 120 publications

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“…A localised eutectic bond was then used to connect the interposer to the backside of the device. For a wafer-scale bonding, issues occur with high stress (due to the device size), reducing the connection quality [171]. On a wafer-scale, the studs are commonly microfabricated as opposed to using a ball bonder [172].…”

Section: Stacked Wafer Technologymentioning

confidence: 99%

Engineering of microfabricated ion traps and integration of advanced on-chip features

et al. 2020

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Section: Stacked Wafer Technologymentioning

confidence: 99%

Engineering of microfabricated ion traps and integration of advanced on-chip features

et al. 2020

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“…Assuming that the quartz gyroscope structure is directly fixed on the shock table, as shown in Figure 5 , and assuming that the installation structure of the gyroscope, the influence of PCB and adhesive glue are not considered and the impact dynamic equation of gyroscope in non-working state [ 23 , 24 ] is,

where

, and

are the mass, damping coefficient, and stiffness of the quartz structure respectively.…”

Section: Analysis Of Impact Response Characteristics Of Micro-machmentioning

confidence: 99%

Development of V-Shaped Beam on the Shock Resistance and Driving Frequency of Micro Quartz Tuning Forks Resonant Gyroscope

Bai

Zhao

2020

Micromachines

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The application of gyroscopes in harsh environments has always been a hot topic. As a high-quality material for manufacturing gyroscopes, quartz crystals need to be designed and optimized to meet the normal operation of gyroscopes in harsh environments. The Micro Electronics Mechanical System(MEMS) quartz tuning forks resonant gyroscope is one of the quartz gyroscopes. The elastic structure (V-shaped beam) between the anchor support point and tuning forks plays a vital role in the MEMS quartz tuning forks resonant gyroscope. This structure determines the natural frequency of the gyroscope, and more importantly, determines the shock resistance of the gyroscope structure. In this article, the MEMS quartz tuning forks gyroscope with different V-shaped beam thicknesses are simulated and analyzed by finite element analysis simulation software. After the modal analysis and shock simulation (the half-cycle sine shock pulse with amplitude of 1500 g (g is the acceleration of gravity) and duration of 2 ms in the six shock directions), the results show that when the beam thickness is 80 μm, the maximum stress is 94.721 MPa, which is less than the failure stress of quartz crystal. The gyroscope’s shock resistance is verified through shock testing.

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“…However, the resolution and stability of MEMS inertial sensors are not adequate and must be improved in sensor networking, for example, for the monitoring of human motion, the distribution of earthquakes, and the vibration of buildings [ 23 ]. MEMS gyroscope signal errors are often due to their high sensitivity to environmental disturbances such as shocks, vibrations, and temperature changes [ 24 ]. For human motion analysis with wearable sensor systems, large amounts of noise, such as human tremors and environmental vibrations, are included in the measurement signals [ 25 , 26 , 27 ].…”

Section: Introductionmentioning

confidence: 99%

Signal Quality Improvement Algorithms for MEMS Gyroscope-Based Human Motion Analysis Systems: A Systematic Review

Gerdtman²,

Lindén

2018

Sensors

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Motion sensors such as MEMS gyroscopes and accelerometers are characterized by a small size, light weight, high sensitivity, and low cost. They are used in an increasing number of applications. However, they are easily influenced by environmental effects such as temperature change, shock, and vibration. Thus, signal processing is essential for minimizing errors and improving signal quality and system stability. The aim of this work is to investigate and present a systematic review of different signal error reduction algorithms that are used for MEMS gyroscope-based motion analysis systems for human motion analysis or have the potential to be used in this area. A systematic search was performed with the search engines/databases of the ACM Digital Library, IEEE Xplore, PubMed, and Scopus. Sixteen papers that focus on MEMS gyroscope-related signal processing and were published in journals or conference proceedings in the past 10 years were found and fully reviewed. Seventeen algorithms were categorized into four main groups: Kalman-filter-based algorithms, adaptive-based algorithms, simple filter algorithms, and compensation-based algorithms. The algorithms were analyzed and presented along with their characteristics such as advantages, disadvantages, and time limitations. A user guide to the most suitable signal processing algorithms within this area is presented.

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MEMS Reliability

Cited by 6 publications

References 120 publications

Engineering of microfabricated ion traps and integration of advanced on-chip features

Engineering of microfabricated ion traps and integration of advanced on-chip features

Development of V-Shaped Beam on the Shock Resistance and Driving Frequency of Micro Quartz Tuning Forks Resonant Gyroscope

Signal Quality Improvement Algorithms for MEMS Gyroscope-Based Human Motion Analysis Systems: A Systematic Review

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