MEMS scanners and emerging 3D and interactive Augmented Reality display applications

MEMS Laser Scanners: A Review

“…The outer frame also makes it possible to apply force directly in the moving structure. Ideally the PE electrode should be designed to conform to the mode shape of the mechanical structure [84].…”

“…This solution is a development of the mirror suspension used for the ES scanner presented in [85]. An improved version of the scanner with approximately 40% performance increase for corresponding voltage level was presented in [84]. The mechanical structure is identical, but the PZT electrode is tailored to have a static deflection profile that conforms with the desired eigenmode shape.…”

Wearable Augmented Reality Displays

“…The general problems with wearable augmented reality displays (particularly near-to-eye displays) are the restricted field of view, low light efficiency and involvement of bulky optical elements. In this paper, as an alternative to near-to-eye displays, we present the wide field of view, compact and light-efficient displays based on head worn pico-projectors andretro-reflective screensthat have been recently developed in our group for 2D/3D augmented reality applications [1][2][3][4][5][6][7]. First, we introduce a compact head-worn display assembled around a regular cap.…”

Development of a two-dimensional scanning micro-mirror utilizing magnetic polymer composite

“…Many micro-mirror devices fabricated by microelectromechanical systems (MEMS) technology are presented in the literature, for applications such as projectors, object detection lasers, laser scanners and others. [1][2][3][4][5][6][7][8][9][10][11][12] Most of the micromirrors discussed were made of silicon, and achieved highspeed laser scanning through the utilization of high rigidity and reliability of silicon. On the other hand, micro-mirrors made of silicon require complex structures and complex driving methods in order to attain a large deflection angle.…”