MEMS Switch Material Dependency on Designing a Reconfigurable Antenna

Alam, Ahm Zahirul; Islam, Md. Rafiqul; Khan, Sheroz; Azlani, B.M.; Razak, M.M. Bt. Abdul

doi:10.1109/smelec.2006.381076

Cited by 2 publications

(2 citation statements)

References 14 publications

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“…Such materials as gold, aluminum, platinum, molybdenum, copper, and nickel can be used to make an RF MEMS switch with capacitive switching principle [54][55][56][57].…”

Section: Selection Of Structural Materials Of Rf Mems Switch With Capamentioning

confidence: 99%

Analytical Approach in the Development of RF MEMS Switches

et al. 2018

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Currently, the technology of microelectromechanical systems is widely used in the development of high-frequency and ultrahigh-frequency devices. The most important requirements for modern and advanced devices of the ultra-high-frequency range are the reduction of weight and size characteristics, power consumption with an increase in their functionality, operating frequency and level of integration. Radio frequency microelectromechanical switches are developed using the technology of the manufacture of CMOS-integrated circuits. Integrated radio frequency control circuits require low control voltages, the high ratio of losses to the isolation in the open and closed condition, high performance and reliability. This review is devoted to the analytical approach based on the knowledge of materials, basic performance indices and mechanisms of failure, which can be used in the development of radio-frequency microelectromechanical switches.

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“…Such materials as gold, aluminum, platinum, molybdenum, copper, and nickel can be used to make an RF MEMS switch with capacitive switching principle [54][55][56][57].…”

Section: Selection Of Structural Materials Of Rf Mems Switch With Capamentioning

confidence: 99%

Analytical Approach in the Development of RF MEMS Switches

et al. 2018

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“…Through literature review [11][12][13][14] it has been observed that the possible materials used for bridge material for fixed-fixed beam capacitive shunt switch are gold, aluminum, platinum, molybdenum, copper, nickel, alumina, and silicon nitride. In this study, the key material indices considered for MEMS capacitive switch are Young's modulus, electrical resistivity, Poisson's ratio, thermal expansion coefficient, and thermal conductivity.…”

Section: Introductionmentioning

confidence: 99%

Material Selection of Rf-Mems Switch Used for Reconfigurable Antenna Using Ashby's Methodology

Sharma¹,

Gupta²

2012

PIER Letters

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Abstract-This paper reports material selection methodology for radio frequency -micro electro mechanical systems (RF-MEMS) switches used for reconfigurable antennas. As there are variety of materials available to design engineer, a proper technique to select the best possible material is needed. Three primary performance indices, pull-in voltage, RF-loss, and thermal residual stress, are used to obtain the desired performance. The selection chart shows that aluminum is the most suitable material for being used as bridge material in RF-MEMS switches to provide the best performance in reconfigurable antenna.

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MEMS Switch Material Dependency on Designing a Reconfigurable Antenna

Cited by 2 publications

References 14 publications

Analytical Approach in the Development of RF MEMS Switches

Analytical Approach in the Development of RF MEMS Switches

Material Selection of Rf-Mems Switch Used for Reconfigurable Antenna Using Ashby's Methodology

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