MEMS type ionization vacuum sensor

Grzebyk, Tomasz; Górecka-Drzazga, Anna

doi:10.1016/j.sna.2016.05.021

Cited by 30 publications

(8 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The other problem closely related to the subject discussed here is the controlling of the inner atmosphere of MEMS cells. Several publications have shown that residual gases coming from degassing from inner surfaces and interfaces of bonded materials can easily be removed by non-evaporable getters (NEGs), for example, MEMS getters produced by SAES Getters (Italy) [81,90,91]. As well documented in the literature, argon and helium remains ungettered at level of 10 −5 Torr and 10 −3 Torr, respectively.…”

Section: Conclusion and Final Remarksmentioning

confidence: 99%

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Knapkiewicz

2018

Micromachines

View full text Add to dashboard Cite

This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail. Special attention is paid to alkali atom introduction methods and sealing of the MEMS structure. Characteristics of each technology are collated and compared. The article’s rhetoric is guided by the proposed classification of MEMS cell fabrication methods and contains a historical outline of MEMS cell technology development.

show abstract

Section: Conclusion and Final Remarksmentioning

confidence: 99%

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Knapkiewicz

2018

Micromachines

View full text Add to dashboard Cite

show abstract

“…The pump makes possible the generation and stabilization of pressure at a 10 −8 Torr vacuum level, and its construction is fully compatible with MEMS technology. These advantages make the pump usable in new applications [ 23 , 24 , 25 ] including self-pumping MEMS optical cells for atomic spectroscopy.…”

Section: Self-pumping Mems Optical Cell For Atomic Spectroscopymentioning

confidence: 99%

Alkali Vapor MEMS Cells Technology toward High-Vacuum Self-Pumping MEMS Cell for Atomic Spectroscopy

Knapkiewicz

2018

Micromachines

View full text Add to dashboard Cite

The high-vacuum self-pumping MEMS cell for atomic spectroscopy presented here is the result of the technological achievements of the author and the research group in which he works. A high-temperature anodic bonding process in vacuum or buffer gas atmosphere and the influence of the process on the inner gas composition inside a MEMS structure were studied. A laser-induced alkali vapor introduction method from solid-state pill-like dispenser is presented as well. The technologies mentioned above are groundbreaking achievements that have allowed the building of the first European miniature atomic clock, and they are the basis for other solutions, including high-vacuum optical MEMS. Following description of the key technologies, high-vacuum self-pumping MEMS cell construction and preliminary measurement results are reported. This unique solution makes it possible to achieve a 10−6 Torr vacuum level inside the cell in the presence of saturated rubidium vapor, paving the way to building a new class of optical reference cells for atomic spectroscopy. Because the level of vacuum is high enough, experiments with cold atoms are potentially feasible.

show abstract

“…Since this instrument is a main element in the various applications, considerable researches and studies have been performed to develop new techniques for the detection of the various gases. Indeed, the present gas sensor is highly expensive and spacious and these disadvantages of the current sensors have motivated the researchers to develop a simple and cheap method for the gas detection [1][2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Application of Knudsen Force for Development of Modern Micro Gas Sensors

Gerdroodbary¹

2020

Gas Sensors

View full text Add to dashboard Cite

Development of new simple gas sensor is highly significant due to its various industrial applications. In this chapter, comprehensive studies on the new micro gas sensor of Micro In-plane Knudsen Radiometric Actuator (MIKRA) are done to evaluate the performance of its technique on the detection of gas. This new micro gas sensor works by the radiometric phenomena, which occurs due to temperature difference in rarefied gas. In order to simulate this micro gas sensor, direct simulation Mont Carlo (DSMC) is recognized as a reliable method. This study highly focused on the main mechanisms of the flow feature and force generation in low-pressure domain. In order to study this micro gas sensor, comprehensive numerical results are thoroughly investigated and the effects of primary factors and parameters are revealed. In addition, the main details of computational approach for the simulation of this micro gas sensor are fully presented. Finally, the performance of this sensor in various operating conditions is explained and main findings are discussed.

show abstract

MEMS type ionization vacuum sensor

Cited by 30 publications

References 16 publications

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

Alkali Vapor MEMS Cells Technology toward High-Vacuum Self-Pumping MEMS Cell for Atomic Spectroscopy

Application of Knudsen Force for Development of Modern Micro Gas Sensors

Contact Info

Product

Resources

About