Mercury-free emitter pumped by a krypton fluoride molecule pulse-periodic barrier discharge

Abstract

The characteristics of a pulsed-periodic short barrier discharge emitter operating at wavelength λ = 248 nm KrF(X-B) are investigated. The operating mixtures of the UV lamp are low aggressive kryptonsulfur hexafluoride (SF 6 ) mixtures at a total pressure in the range 1-50 kPa and a SF 6 partial pressure of 0.1-0.4 kPa. The spectral characteristics of the plasma are studied, and the 248 nm KrF(X-B) band luminosity is optimized in terms of the operating mixture composition, pump voltage, and pulse repetition rate. The mean power of UV emission from the lateral surface of the cylindrical lamp is estimated.