1972
DOI: 10.1016/0022-3093(72)90267-0
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Metal contact induced crystallization in films of amorphous silicon and germanium

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Cited by 293 publications
(63 citation statements)
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“…Si and the considered metal. Herd et al [15] concluded from their work that the crystallization is controlled by the kinetics of the diffusion along the metal/semiconductor interface. These kinetics are enhanced due to the decrease of the eutectic temperature, caused by the amorphous semiconductor [16].…”
Section: Discussionmentioning
confidence: 99%
“…Si and the considered metal. Herd et al [15] concluded from their work that the crystallization is controlled by the kinetics of the diffusion along the metal/semiconductor interface. These kinetics are enhanced due to the decrease of the eutectic temperature, caused by the amorphous semiconductor [16].…”
Section: Discussionmentioning
confidence: 99%
“…The low temperature crystallization of amorphous silicon or germanium by metals is a well known phenomenon [10], whose exact physical background is still not sufficiently understood. Because the solid phase crystallization temperature in the presence of many metals (Au, Ag, Ni, Al, …) can be considerably reduced (e.g.…”
Section: Aluminium-induced Crystallization Of Sige Filmsmentioning
confidence: 99%
“…This primarily concerns not only the grain size but also the quality of the grain. Two common techniques to fabricate poly-Si is solid phase crystallization (SPC) from amorphous silicon (a-Si:H) at temperature of about 600 8C or metal induced crystallization (MIC) [1][2][3][4]. However, SPC suffers from long processing times and a large dislocation density in the grains.…”
Section: Introductionmentioning
confidence: 99%