We have used synchrotron x-ray diffraction to study the homoepitaxial growth on Cu͑001͒, Ag͑001͒, and Ag͑111͒, at temperatures between 300 and 65 K. The growth on all of these surfaces exhibits a consistent trend towards a large compressive strain that is attributed to the incorporation of vacancies into the growing film below 160 K. In each case, the vacancy concentration is ϳ2% at 110 K and we have measured the temperature dependence for incorporation on the ͑001͒ surfaces as well as the annealing behavior for Cu͑001͒. These results, which suggest new kinetic mechanisms, have important implications for understanding epitaxial crystal growth.