Metal‐Organic Chemical Vapor Deposition of Aluminum Yttrium Nitride

Streicher, Isabel; Prescher, Mario; Straňák, Patrik; Kirste, Lutz

doi:10.1002/pssr.202300091

Cited by 12 publications

(3 citation statements)

References 57 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For the synthesis of thin films, vapor-phase approaches, such as (plasma-assisted, ammonia-based, or metal-modulated) molecular beam epitaxy (MBE) [2,66,72] and metal organic vapor phase epitaxy (MOVPE) [69,70] are the primarily used techniques yielding high crystalline quality III-N with controllable layer thicknesses and dopant/alloying control, while reports on MBE [73,74] or MOVPE growth of other nitrides also exist [75,76]. Generally, these techniques are capable of yielding high quality material at temperatures below their decomposition temperature.…”

Section: Brief Overview Of Methods For Nitride Synthesis and Crystal ...mentioning

confidence: 99%

Ammonothermal Crystal Growth of Functional Nitrides for Semiconductor Devices: Status and Potential

Wostatek,

Chirala,

Stoddard

et al. 2024

Materials

View full text Add to dashboard Cite

The state-of-the-art ammonothermal method for the growth of nitrides is reviewed here, with an emphasis on binary and ternary nitrides beyond GaN. A wide range of relevant aspects are covered, from fundamental autoclave technology, to reactivity and solubility of elements, to synthesized crystalline nitride materials and their properties. Initially, the potential of emerging and novel nitrides is discussed, motivating their synthesis in single crystal form. This is followed by a summary of our current understanding of the reactivity/solubility of species and the state-of-the-art single crystal synthesis for GaN, AlN, AlGaN, BN, InN, and, more generally, ternary and higher order nitrides. Investigation of the synthesized materials is presented, with a focus on point defects (impurities, native defects including hydrogenated vacancies) based on GaN and potential pathways for their mitigation or circumvention for achieving a wide range of controllable functional and structural material properties. Lastly, recent developments in autoclave technology are reviewed, based on GaN, with a focus on advances in development of in situ technologies, including in situ temperature measurements, optical absorption via UV/Vis spectroscopy, imaging of the solution and crystals via optical (visible, X-ray), along with use of X-ray computed tomography and diffraction. While time intensive to develop, these technologies are now capable of offering unprecedented insight into the autoclave and, hence, facilitating the rapid exploration of novel nitride synthesis using the ammonothermal method.

show abstract

Section: Brief Overview Of Methods For Nitride Synthesis and Crystal ...mentioning

confidence: 99%

Ammonothermal Crystal Growth of Functional Nitrides for Semiconductor Devices: Status and Potential

Wostatek,

Chirala,

Stoddard

et al. 2024

Materials

View full text Add to dashboard Cite

show abstract

“…Metalorganic precursors are introduced to the deposition chamber, in which they undergo chemical transformations on the surface of the metallic BP. This results in the formation of a nitride coating [46]. Hot-Wall CVD, in hot-wall CVD, the substrate is externally heated, enhancing the chemical reaction between precursors.…”

Section: Chemical Vapour Depositionmentioning

confidence: 99%

Advancement and characterization of Nitride Coating Materials on Aluminum Alloy-based Bipolar plates in PEMFC's Applications

Narasimharaju,

Annamalai

2024

MATEC Web Conf.

View full text Add to dashboard Cite

This review article delves into the recent strides made in the realm of Proton Exchange Membrane Fuel Cell through the exploration of nitride coating materials on Aluminium (Al) alloy-based Bipolar plates (BPs). The study focuses on the advancements achieved in enhancing the performance and durability of these crucial components. Through a comprehensive characterization process, the nitride coatings' impact is assessed, emphasizing critical parameters such as corrosion current density, potentiostat results, and Internal Contact Resistance (ICR). The review highlights the notable advantages brought about by nitride coatings, particularly their corrosion resistance and durability, in mitigating challenges posed by the demanding operational conditions of fuel cells. Additionally, it sheds light on existing challenges, such as coating porosity and adhesion issues, underscoring the importance of ongoing research efforts to optimize these materials. As the exploration of nitride-coated Al alloy BPs progresses, this review anticipates contributing valuable insights to the broader goal of advancing sustainable and efficient energy solutions in PEMFC applications.

show abstract

“…[16] It is clear that experimental routes of obtaining Y-rich AlYN alloys are to be found in order to settle this dispute. Recently, Leone et al reported on the metalorganic chemical vapor deposition (MOCVD) growth of AlYN with varied Y concentrations grown on GaN and AlN surfaces, [23] enabling new perspective on the challenges of pseudobinary nitride alloys.…”

Section: Introductionmentioning

confidence: 99%

AlYN Thin Films with High Y Content: Microstructure and Performance

Solonenko

Strube

Fammels

et al. 2023

Physica Rapid Research Ltrs

View full text Add to dashboard Cite

Pseudobinary nitride alloys display enhanced piezoelectric properties compared to their nonalloyed counterparts enabling their wide application in high‐performance transducers and acoustic wave resonators. Their fabrication remains challenging because of their inherently stochastic nature, which requires in‐depth understanding of the film growth dynamics and the interplay of deposition parameters. Herein, thin Al1−xYxN films are produced with varied yttrium content in the range from x = 0.09 to 0.28 on a gradient seed layer on 200‐mm Si substrates and investigated via various X‐ray diffraction methods, high‐resolution scanning transmission electron microscopy, nanoindentation, and atomic force microscopy. Bulk acoustic wave resonators, solidly mounted on a multilayer acoustic isolation, are fabricated to analyze the piezoelectric performance of the films and to extract corresponding material parameters via fitting of the high‐frequency electrical response by 1D Mason's model. The trend of declining coupling is explained by the lattice softening and the increase in electron density, experimentally observed by monitoring reduced elastic modulus and dielectric constant values, respectively. The absence of expected enhancement of the piezoelectric modulus is interpreted by the presence of oxygen impurities, facilitating the inhomogeneous strain of the AlYN lattice, which effectively cancels the energy flattening phenomenon, found in III–V pseudobinary alloys.

show abstract

Metal‐Organic Chemical Vapor Deposition of Aluminum Yttrium Nitride

Cited by 12 publications

References 57 publications

Ammonothermal Crystal Growth of Functional Nitrides for Semiconductor Devices: Status and Potential

Ammonothermal Crystal Growth of Functional Nitrides for Semiconductor Devices: Status and Potential

Advancement and characterization of Nitride Coating Materials on Aluminum Alloy-based Bipolar plates in PEMFC's Applications

AlYN Thin Films with High Y Content: Microstructure and Performance

Contact Info

Product

Resources

About