The term electroless plating was originally used by Brenner and Riddell [1], inventors of the well-known autocatalytic nickel and cobalt plating processes using hypophosphite as the reducing agent. A literature survey indicates, however, that this term is currently being used to describe three mechanistically different, nonelectrolytic processes for depositing metals and alloys: (1) galvanic displacement plating (also called immersion plating or cementation), (2) substrate-catalyzed plating, and (3) autocatalytic plating. In this chapter only autocatalytic gold plating processes are reviewed.The first autocatalytic, electroless gold plating bath was developed in 1970 at Bell Laboratories [1a] to plate thick, pure soft gold on semiconductors and circuit boards without employing an external source of electric current. The bath contained potassium cyanoaurate (I), KAu(CN) 2 , as the source of gold, potassium borohydride, KBH 4 , or dimethylamine borane, (CH 3 ) 2 NHÁBH 3 , as the reducing agent, potassium cyanide, and potassium hydroxide. Typical bath compositions are given in Table 21.1. The original baths did not contain stabilizing additives, and they were sensitive to minute amounts of impurities, which tended to lead to spontaneous decomposition. Nevertheless, those baths were employed successfully with sufficient stability under carefully controlled conditions [2-5], yielding highly pure, soft gold useful for the purpose of bonding semiconductor devices [6]. Other successful applications documented in the open literature include (1) metallization of GaAs microwave field-effect transistors [7], (2) formation of ohmic contacts consisting of Pd/Sn/Au films on n-GaAs [8], (3) metallization of polyvinylidene fluoride (PVDF) films used for making piezoelectric devices [9], (4) deposition of a conducting layer on the interior surface of waveguide tubes made of an aluminum alloy [10], and (5) deposition of a gold layer on tungsten-metallized ceramics for packaging semiconductor devices [11].More recently the accelerating trend of miniaturization and the need for greater reliability of electronic components have resulted in the development of new technologies for mounting devices on circuit boards, which in turn created new requirements for compatibility of the plating process with substrate materials and also for properties of gold films to be deposited on semiconductors and circuit boards. Quite generally, the method of electroplating has inherent advantages over that of electroless plating in terms of the ease of maintaining the bath and controlling the film thickness and properties. On the other hand, electroless plating has, in principle, a distinct advantage over electroplating in its capability of minimizing the number of processing steps when gold is needed in areas which are electrically isolated from each other. Under these circumstances, efforts have been made to improve the original borohydride and dimethylamine borane (DMAB) baths, especially in their stability and plating rate, and such improved baths are...