Metallic micro displacement capacitive sensor fabricated by laser micromachining technology

Lai, Yongjun; Bordatchev, Evgueni V.; Nikumb, Suwas

doi:10.1007/s00542-006-0151-x

Cited by 7 publications

(7 citation statements)

References 10 publications

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“…As stated in the introduction, there are two papers in which techniques with a similar measurement objective have been discussed. Lai et al [8] have presented a bulkier device with a 50× larger capacitance change, made by laser machining. They used a sensitive commercial Agilent model 4288A capacitance meter to monitor the capacitance changes.…”

Section: Discussionmentioning

confidence: 99%

“…In a laboratory situation, this type of detection is generally not employed, although its use without dedicated chips has been reported on larger scale devices [8,9]. A probe station is typically used in a laboratory environment for electrical contact with the MEMS device under test, and the connecting coaxial cables easily add 100 pF m −1 of parasitic capacitance to the measurement setup.…”

Section: Introductionmentioning

confidence: 99%

“…Performing a single experiment is comparable in complexity to measuring transistor performance parameters with a curve tracer. Because the setup has a large bandwidth (currently 1 kHz but this can be tailored to the requirements of the device), high speed motion changes can be observed, contrary to the approaches in [8,9]. The technique can be beneficial to the understanding of parasitic and non-linear motions in prototype MEMS devices, and makes changing from one device to the next in a testing environment very easy compared to wirebonding each device independently to an appropriate interface semiconductor chip.…”

Section: Introductionmentioning

confidence: 99%

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A sensitive electronic capacitance measurement system to measure the comb drive motion of surface micromachined MEMS devices

Spengen

Oosterkamp

2007

J. Micromech. Microeng.

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We have developed a method to measure the displacement of a MEMS comb drive using a probe station, by monitoring the minute capacitance changes between the fingers due to the motion. Probe station measurements of the capacitance changes of small comb drives are usually hampered by the relatively large parasitic capacitances present. This can be reduced by using a proper measurement layout design for minimal on-chip capacitance, in combination with a resonant LCR-circuit to counteract the effect of the probe station cable capacitance. The method results in a measurement that, after averaging, enables us to see the motion of a MEMS comb drive with 4 nm peak-to-peak noise sensitivity, corresponding to a capacitance change around 10 aF. Both the effect of comb drive lateral motion and that of levitation are observed.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A sensitive electronic capacitance measurement system to measure the comb drive motion of surface micromachined MEMS devices

Spengen

Oosterkamp

2007

J. Micromech. Microeng.

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“…In this mechanism, the micro-object is pushed by one jaw over the other during grasping process to activate the sensor, an operation not much desired to manipulate the micro-organisms. The displacement sensor reported in [10] is based on lateral change in the capacitance upon the application of force however it has not been integrated with microgripper.…”

Section: Introductionmentioning

confidence: 99%

Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor

Bazaz¹,

Khan²,

Shakoor³

2011

Sensors and Actuators A: Physical

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“…Parasitic capacitance from the measurement setup makes precise detection of tiny capacitance changes a challenging issue. Commercially available LCR capacitive meters are used to measure the capacitance from strain sensor [10] and positioning sensors [14,15]. Resonant LCR circuits [9,15,22] are also used to detect the change of capacitance in comb drives.…”

Section: Introductionmentioning

confidence: 99%

Simultaneous actuation and displacement sensing for electrostatic drives

Dong

Ferreira

2008

J. Micromech. Microeng.

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This paper presents a method for driving a MEMS electrostatic actuator, while simultaneously sensing the resulting displacement/capacitance without the use of an additional physical sensing structure. The approach superposes the sensing and actuation signals into a single input into the system and obtains its mechanical (displacement) response from the modulation (amplitude or phase) it produces on the sensing input. The approach is analyzed and experimentally shown to produce an amplitude modulation of 0.1857 mV µm −1 of displacement on electrostatic drive that produces a displacement of 14 µm at 100 V and a 0.55 pF capacitance change from a nominal capacitance of 0.35 Pico farads. The approach enables a very cost-effective and convenient approach to detect the displacement of MEMS devices for a variety of applications in the laboratory environment, and provide a potential feedback signal for closed-loop control of electrostatically driven MEMS devices.

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Metallic micro displacement capacitive sensor fabricated by laser micromachining technology

Cited by 7 publications

References 10 publications

A sensitive electronic capacitance measurement system to measure the comb drive motion of surface micromachined MEMS devices

A sensitive electronic capacitance measurement system to measure the comb drive motion of surface micromachined MEMS devices

Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor

Simultaneous actuation and displacement sensing for electrostatic drives

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