“…Metamorphic devices have been produced from Si x Ge 1Àx /Si [3,4], In x Ga 1Àx As/GaAs [5][6][7], In x Ga 1Àx As/InP [8], and In x Ga 1Àx P/GaP [9,10]. Close to 100% strain relaxation and reduction in threading dislocation density to below the detection limit of plan-view transmission electron microscopy (TEM), 10 6 cm À2 , have been reported [7,10]. The demonstrated high efficiency of strain relaxation is related to the control of misfit dislocation (in-plane between substrate and epitaxial layer) formation rates in the material.…”