Metasurface Photodetectors

Li, Jinzhao; Li, Junyu; Zhou, Siyang; Yi, Fei

doi:10.3390/mi12121584

Cited by 23 publications

(26 citation statements)

References 68 publications

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“…We focus our discussion on photodetectors that are active in the visible and IR spectral range, which is where most photonic applications lie. We refer the reader to the following reviews for sensing in the microwave and THz regime as well as a more extended discussion on light-trapping and absorbing schemes for photodetectors. ,,− …”

Section: Photon–electron Energy Conversionmentioning

confidence: 99%

Optical Metasurfaces for Energy Conversion

et al. 2022

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Nanostructured surfaces with designed optical functionalities, such as metasurfaces, allow efficient harvesting of light at the nanoscale, enhancing light–matter interactions for a wide variety of material combinations. Exploiting light-driven matter excitations in these artificial materials opens up a new dimension in the conversion and management of energy at the nanoscale. In this review, we outline the impact, opportunities, applications, and challenges of optical metasurfaces in converting the energy of incoming photons into frequency-shifted photons, phonons, and energetic charge carriers. A myriad of opportunities await for the utilization of the converted energy. Here we cover the most pertinent aspects from a fundamental nanoscopic viewpoint all the way to applications.

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Section: Photon–electron Energy Conversionmentioning

confidence: 99%

Optical Metasurfaces for Energy Conversion

et al. 2022

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“…Recently, other approaches have been proposed by the scientific community: i) light trapping (by means of nanotexturing) [6]; ii) integration with photonic structures (metalenses or metasurfaces) [7], or iii) integration with metal nanostructures supporting plasmonic resonances, [8]. Among the others, a proposed solution is the integration of thin photodetectors with a nanostructure supporting Surface Plasmon Polaritons (SPP) able to provide light confinement and a subsequent enhancement of the light absorption in subwavelength regions.…”

Section: Of 14mentioning

confidence: 99%

Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritrons

Scattolo¹,

Cian²,

Petti³

et al. 2022

Preprint

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Recently, the interest in silicon-based detectors capable of detecting single photons in the near-infrared is growing mainly due to LiDAR applications, autonomous driving in particular. Silicon single-photon avalanche diodes are one of the most interesting single-photon NIR technology available on the market, nevertheless, their efficiency is hindered by the low absorption coefficient of Si in the NIR. The idea is the integration of CMOS-compatible nanostructures, specifically, silver grating array supporting Surface Plasmons Polaritons (SPPs), to confine superficially the incoming NIR photons and therefore increase photons probability to generate an electron-hole pair. The plasmonic silver array is geometrically fine-tuned using time domain simulation software to achieve maximum detector performance at 950 nm. Then, the plasmonic silver array is integrated by means of the focused ion beam technique on the detector. Finally, the integrated detector is electro-optically characterized, demonstrating a quantum efficiency of 13 at 950 nm, 2,2 times more than the reference detector. This result suggests the production of a device capable of detecting single NIR photons, at a very low cost and compatible with CMOS, thus integrable on existing technology platforms.

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“…Recently, other approaches have been proposed by the scientific community: (i) light trapping (by means of nanotexturing) [ 10 ]; (ii) integration with photonic structures (metalenses or metasurfaces) [ 11 ], or (iii) integration with metal nanostructures supporting plasmonic resonances, [ 12 , 13 ]. Among the others, a very interesting proposed solution is the integration of thin photodetectors with a nanostructure supporting surface plasmon polaritons (SPP) able to confine the light in a sub-wavelength region at the detector surface, with a subsequent absorption enhancement.…”

Section: Introductionmentioning

confidence: 99%

Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritrons

Scattolo

Cian

Petti

et al. 2023

Sensors

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Recent years have witnessed a growing interest in detectors capable of detecting single photons in the near-infrared (NIR), mainly due to the emergence of new applications such as light detection and ranging (LiDAR) for, e.g., autonomous driving. A silicon single-photon avalanche diode is surely one of the most interesting and available technologies, although it yields a low efficiency due to the low absorption coefficient of Si in the NIR. Here, we aim at overcoming this limitation through the integration of complementary metal–oxide–semiconductor (CMOS) -compatible nanostructures on silicon photodetectors. Specifically, we utilize silver grating arrays supporting surface plasmons polaritons (SPPs) to superficially confine the incoming NIR photons and therefore to increase the probability of photons generating an electron-hole pair. First, the plasmonic silver array is geometrically designed using time domain simulation software to achieve maximum detector performance at 950 nm. Then, a plasmonic silver array characterized by a pitch of 535 nm, a dot width of 428 nm, and a metal thickness of 110 nm is integrated by means of the focused ion beam technique on the detector. Finally, the integrated detector is electro-optically characterized, demonstrating a QE of 13% at 950 nm, 2.2 times higher than the reference. This result suggests the realization of a silicon device capable of detecting single NIR photons, at a low cost and with compatibility with standard CMOS technology platforms.

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Metasurface Photodetectors

Cited by 23 publications

References 68 publications

Optical Metasurfaces for Energy Conversion

Optical Metasurfaces for Energy Conversion

Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritrons

Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritrons

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