We carried out a density functional
theory study to investigate
the adsorption behavior of four kinds of SF
6
decomposed
products over the ZnO(101̅0) surface. The effects of O and Zn
vacancies on the surface were also considered. For perfect ZnO(101̅0)
surface, the adsorption of SO
2
and H
2
S exhibits
stronger chemical interactions compared to the adsorption of SOF
2
and SO
2
F
2
. For SO
2
and H
2
S adsorption, there may exist new chemical bond formation
between the molecule and the surface and the H
2
S molecule
experiences one H–S broken bond. The introduction of O vacancy
cannot obviously enhance the chemical interactions between these four
molecules and the surface. However, the Zn vacancy on the surface
can significantly elevate the chemical interactions between SO
2
/H
2
S and the surface. The two-coordinated O atom
(O
2c
) on the surface plays an important role. For SO
2
and H
2
S adsorption, the S atom in SO
2
or H
2
S tends to bond to the O
2c
atom, bringing
much larger adsorption energy compared to the adsorption over the
perfect ZnO(101̅0) surface. This work can provide a basis for
surface modification of ZnO in applications to detecting SF
6
decomposed products by theoretical evaluation.