Method for fabrication of microfluidic systems in glass

Stjernström, Mårten; Roeraade, Johan

doi:10.1088/0960-1317/8/1/006

Cited by 174 publications

(118 citation statements)

References 22 publications

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“…The etch was performed for 90 min at 25°C with propeller agitation in equal parts of deionized water, 1 M hydrochloric acid, and buffered oxide etchant (6 ammonium fluoride:1 hydrofluoric acid, Transene Company). Hydrochloric acid was used to prevent the redeposition of insoluble fluoride salts (30). The etch was performed for 90 min at 25°C for a maximum well depth of 80 m. The slides were first washed in acetone to remove the photoresist and then cleaned in an acid bath (NanoStrip Cyantek, Fremont, CA).…”

Section: Methodsmentioning

confidence: 99%

A robust and scalable microfluidic metering method that allows protein crystal growth by free interface diffusion

Hansen

Skordalakes

Berger

et al. 2002

Proc. Natl. Acad. Sci. U.S.A.

482

357

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Producing robust and scalable fluid metering in a microfluidic device is a challenging problem. We developed a scheme for metering fluids on the picoliter scale that is scalable to highly integrated parallel architectures and is independent of the properties of the working fluid. We demonstrated the power of this method by fabricating and testing a microfluidic chip for rapid screening of protein crystallization conditions, a major hurdle in structural biology efforts. The chip has 480 active valves and performs 144 parallel reactions, each of which uses only 10 nl of protein sample. The properties of microfluidic mixing allow an efficient kinetic trajectory for crystallization, and the microfluidic device outperforms conventional techniques by detecting more crystallization conditions while using 2 orders of magnitude less protein sample. We demonstrate that diffraction-quality crystals may be grown and harvested from such nanoliter-volume reactions.

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Section: Methodsmentioning

confidence: 99%

A robust and scalable microfluidic metering method that allows protein crystal growth by free interface diffusion

Hansen

Skordalakes

Berger

et al. 2002

Proc. Natl. Acad. Sci. U.S.A.

482

357

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“…If the masking layer presents a hydrophilic surface, the etching solution will easily penetrate through this crack and generate a pinhole. Many masking materials for wet etching of glass have been reported in the literature, including photoresist, 52 amorphous Si deposited at low (200 C) 53 or high temperatures (570 C), 54 LPCVD polysilicon, 55,56 Cr/Au, 57 Cr/photoresist, 58 bulk Si, 59 amorphous SiC/ PECVD, 60 Ag, 61 Mo, 62 and Ti. 63 A detailed analysis of masking materials used in wet etching of glass is presented in Ref.…”

Section: Wet Etchingmentioning

confidence: 99%

A practical guide for the fabrication of microfluidic devices using glass and silicon

Iliescu¹,

Taylor²,

Avram³

et al. 2012

Biomicrofluidics

311

207

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This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. I. WHY USE SILICON AND GLASS IN MICRO-AND NANO-FLUIDIC APPLICATIONS?Micro-and nano-fluidic technology continues to be embraced by biologists, 1-3 chemists, 4 and engineers throughout academia and industry. As its applications have expanded, there has been an explosion in the range of materials and processes used to fabricate these devices. The earliest microfluidic devices (e.g., gas 5 and liquid 6 chromatography devices) were made from silicon and glass and borrowed processes directly from semiconductor and microelectromechanical systems (MEMS) manufacturing. 7 Now, however, many researchers have moved away from silicon and glass, and instead use cast elastomers such as polydimethylsiloxane (PDMS)-which is ideal for swift prototyping-or thermoplastic polymers, which can be hot-embossed or injection-molded and are well suited to inexpensive manufacturing. Yet, there remain many applications where glass and silicon offer advantages over polymeric materials. In this paper, we highlight these advantages and offer a framework for selecting fabrication processes when using silicon and glass. A. The dominance of soft lithographyOver the last decade, PDMS has become virtually the default material for forming microfluidic devices, 8 because of the sheer ease with which it can be cast on to a micro-scale mould and then strongly bonded to glass. 9 The elastomeric nature of the material has been exploited to integrate fluidic valves and pumps on-chip and has simplified the production of multi-layer devices because the soft layers readily conform to each other. 10,11 Yet, the low stiffness (usually <1 MPa) of PDMS relative to amorphous thermoplastics, silicon, and glass has its own a) Authors to whom correspondence should be addressed. Electronic addresses: ciliescu@ibn.a-star.edu.sg and hkt@ntu.edu.sg. 6, 016505 (2012) drawbacks. High aspect-ratio channels are notoriously difficult to fabricate in PDMS because of their propensity to collapse. 12 Moreover, difficulties in automating the handling of such a soft material have hampered efforts to scale up PDMS device manufacturing. Meanwhile, PDMS's high oxygen and water permeabilities have proved both a blessing and a curse in different applications.The hydrophobic nature of PDMS can be an important consideration for some biological applications. In drug screening applications, for example, hydrophobic drugs as well as metabolites (urea or albumin) can be absorbed into the device's material due to hydrophobic--hydrophobic interaction...

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“…The fabrication material for microfluidic systems has gone through several iterations, starting from the original silicon-based semiconducting materials (Ratner et al 2005), to glass (Stjernstrom and Roeraade 1998), and to the latest organic polymers such as PMMA (polymethylmethacrylate) and PDMS, with PDMS being the most popular and widely used in recent years. As a microfabrication material, PDMS has a number of wellestablished advantages over silicon and glass including low cost, robustness, and biocompatibility (Thangawng et al 2007).…”

Section: Introductionmentioning

confidence: 99%

3D-printed peristaltic microfluidic systems fabricated from thermoplastic elastomer

Wang

McMullen

Yao

et al. 2017

Microfluid Nanofluid

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micropumps and one micromixer. The completed system was successfully applied to the detection of low-level insulin concentration using a chemiluminescence immunoassay, and the test result compares favorably with a similarly designed PDMS microfluidic system. Prior to system fabrication and testing, the material properties of TPE were extensively evaluated. The result indicated that TPE is compatible with biological materials and its 3D-printed surface is hydrophilic as opposed to hydrophobic for a molded PDMS surface. The Young's modulus of TPE is measured to be 16 MPa, which is approximately eight times higher than that of PDMS, but over one hundred times lower than that of ABS.

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Method for fabrication of microfluidic systems in glass

Cited by 174 publications

References 22 publications

A robust and scalable microfluidic metering method that allows protein crystal growth by free interface diffusion

A robust and scalable microfluidic metering method that allows protein crystal growth by free interface diffusion

A practical guide for the fabrication of microfluidic devices using glass and silicon

3D-printed peristaltic microfluidic systems fabricated from thermoplastic elastomer

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