2013
DOI: 10.1016/j.tsf.2013.05.114
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Method for measurement of transferred power to plasma in inductive discharges

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Cited by 8 publications
(6 citation statements)
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“…Piejak et al developed transformer model to analyze ICP electrical properties by considering it as one-turn secondary of air-core transformer, and indicated the variations of spatial average discharge parameters as function of antenna voltage and current [4]. Hwang et al directly calculated the transferred power by comparing the power input at the same current with and without plasma load [6]. Attempts to determine fundamental electrical properties of ICP are achieved in this article over a range of operating condition through monitoring the variation of coil voltage and current.…”
Section: Introductionmentioning
confidence: 99%
“…Piejak et al developed transformer model to analyze ICP electrical properties by considering it as one-turn secondary of air-core transformer, and indicated the variations of spatial average discharge parameters as function of antenna voltage and current [4]. Hwang et al directly calculated the transferred power by comparing the power input at the same current with and without plasma load [6]. Attempts to determine fundamental electrical properties of ICP are achieved in this article over a range of operating condition through monitoring the variation of coil voltage and current.…”
Section: Introductionmentioning
confidence: 99%
“…The current of the antenna and the current passing through the impedance control unit are measured by the current sensor (Pearson current monitor model 110) connected to an oscilloscope (Keysight, DSOX2014A). To obtain the RF power absorbed by the plasma, the system resistance is approximately 0.37 Ω, calculated based on the RF power and antenna current measured without discharge [25]. The 10 sccm each of oxygen and argon gases are injected into the chamber, and the pressure is maintained at 10 mTorr (1.33 Pa) by a pumping system.…”
Section: Methodsmentioning
confidence: 99%
“…The current probe is designed to operate from 1 to 20 MHz and has a sensitivity of 0.05 V/A when an oscilloscope is set to 50 Ω. When the plasma is not discharged in the reactor, the resistance of the powered antenna including the matching circuits (R 1 ) is defined as R 1 = P RF /I 1 2 [26]. As shown in figure 2, the measured R 1 is 0.37 Ω in setup A and 0.29 Ω in setup B, this difference is due to the different position of the powered antenna.…”
Section: Experiments and Measurementmentioning
confidence: 99%