Methods of effective media as optimal methods for modeling the physical properties of nanostructures

Reference gage calibration methods of probe nanometry systems are considered in this work. Existing methods for calibrating reference standards provide high measurement accuracy, but at the same time are distinguished by a high complexity of practical implementation, in particular, the interferometric method, or low accuracy, but with simple practical implementation. Therefore, the urgent task is to develop a calibration methodology that provides a sufficiently high measurement accuracy with a relatively simple practical implementation. The paper proposes a methodology based on the combined use of two methods: a comparative assessment of the step heights of the calibrated gages using one of the probe nanometry systems and the precision measurement of the step height of one of the calibrated gages by computer three-dimensional reconstruction of images in a scanning electron microscope. The components of the measurement uncertainty arising when determining the height of the steps of the calibration standards are investigated. The calculated value of the expanded uncertainty showed that the achievable measurement accuracy is comparable to the accuracy of the interferometric method with a simpler practical implementation. Practical testing of the proposed methodology has shown that the use of calibration techniques developed on its basis provides high accuracy and reproducibility of the results obtained.

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Reference gage calibration methods of probe nanometry systems

Antsyferov

Karabanov

Rusanov

et al. 2021

J. Phys.: Conf. Ser.

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Nanoscale Schottky diodes for studying the activity of aluminum nanoparticles in reaction with water

Nedrygailov

Chernova

Osliakova

2021

J. Phys.: Conf. Ser.

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Hydrogen is a promising fuel for energy storage, transportation, production and consumption. At the same time, hydrogen in its pure form is not found on Earth in large quantities and therefore it is necessary to develop a technology for its production. One of the promising technologies for hydrogen production is the reaction of aluminum nanoparticles with water. At the same time, experimental studies of the elementary mechanisms of this reaction are difficult due to the aggressive properties of a concentrated alkaline solution, which is used to activate the aluminum surface. Here we show that the kinetics of the aluminum-water reaction can be monitored in real time using a Schottky nanodiode sensor, provided that the characteristic size of the nanodiode electrodes does not exceed 10 nm. The investigated nanoparticles are applied to the sensor surface by means of nanofabrication. The charge generated in the aluminum nanoparticles as a result of the reaction creates an electrical signal that is proportional to the rate of the chemical process. This makes it possible to use this technology to study the activity even of small groups of nanoparticles, when the volume of released hydrogen is insufficient to measure the reaction rate.

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Method of preparation of heterogeneous height standards for measurements by means of interferometry

Antsyferov

Maslov

Rusanov

et al. 2022

J. Phys.: Conf. Ser.

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The results of the practical implementation of a method for preparing calibration standards based on magnetron sputtering of a chromium film on the surface of the standard are presented. This film is an electrically conductive layer that preserves the topography of relief elements and allows scanning without charge accumulation in the sample. The results obtained showed that the sputtering of thin chromium films on the surface of height standards, the relief elements of which have different reflection coefficients, makes it possible to measure the heights of such standards with a fairly low error.

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Methods of effective media as optimal methods for modeling the physical properties of nanostructures

Cited by 4 publications

References 12 publications

Reference gage calibration methods of probe nanometry systems

Reference gage calibration methods of probe nanometry systems

Nanoscale Schottky diodes for studying the activity of aluminum nanoparticles in reaction with water

Method of preparation of heterogeneous height standards for measurements by means of interferometry

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