2009
DOI: 10.1134/s1063739709050047
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Methods of parallel integration of carbon nanotubes during the formation of functional devices for microelectronics and sensor technologies

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Cited by 4 publications
(9 citation statements)
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“…By regulating nanotube concentration in the solution one can regulate the thickness of the film to be formed on the surface. As we have shown previously [13], the nanotube orientation and density on the surface can be controlled while using different deposition techniques: dipping, pulling, centrifugation, sputtering.…”
Section: Choosing the Materialsmentioning
confidence: 94%
“…By regulating nanotube concentration in the solution one can regulate the thickness of the film to be formed on the surface. As we have shown previously [13], the nanotube orientation and density on the surface can be controlled while using different deposition techniques: dipping, pulling, centrifugation, sputtering.…”
Section: Choosing the Materialsmentioning
confidence: 94%
“…In a similar way, CNT thin films with complex structures can be fabricated using wafers containing interdigitated electrode elements [ 94 ]. Each of these electrode pairs directs part of the suspended nanotube solution into a geometric shape, which becomes part of the pattern of the thin film [ 94 ]. This method has been used to create electrically conductive channels that could be used for nanosensors [ 94 ].…”
Section: Assembly Of One-dimensional Nanostructuresmentioning
confidence: 99%
“…Each of these electrode pairs directs part of the suspended nanotube solution into a geometric shape, which becomes part of the pattern of the thin film [ 94 ]. This method has been used to create electrically conductive channels that could be used for nanosensors [ 94 ]. Although this fabrication method can create larger films than the previous method, the maximum film area is still restricted by the size of the wafer.…”
Section: Assembly Of One-dimensional Nanostructuresmentioning
confidence: 99%
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“…Ideally, it is desired that CNTs of determined electrical types were precisely wired between the electrodes with stable contacts for device fabrication. [70][71][72][73][74] However, such precise control is extremely challenging due to the ultratiny size of the CNTs, high-resolution nanoscale positioning, and subtle structure diversity. Tremendous efforts have been made to solve the challenges.…”
Section: Controlled Growth and Integration Of One-dimensional Camentioning
confidence: 99%