Methods of simulating thin film deposition using spray pyrolysis techniques

Filipovic, Lado; Selberherr, S.; Mutinati, Giorgio C.; Brunet, E.; Steinhauer, Stephan; Köck, Anton; Teva, J.; Kraft, Jochen; Siegert, J.; Schrank, Franz

doi:10.1016/j.mee.2013.12.025

Cited by 50 publications

(26 citation statements)

References 25 publications

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“…The GO and RGO films were deposited using SPT. It is a technique which uses a liquid source for thin film coating of the desired compound on to preheated substrates [21]- [24]. The deposition temperature was 200˚C while the distance between the nozzle and the substrate was 30 cm.…”

Section: Film Depositionmentioning

confidence: 99%

Synthesis and Characterization of Graphene Oxide and Reduced Graphene Oxide Thin Films Deposited by Spray Pyrolysis Method

Eluyemi¹,

Eleruja²,

Adedeji³

et al. 2016

Graphene

102

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Graphene Oxide (GO) was chemically synthesized from Natural Flake Graphite (NFG). The GO was chemically reduced to Reduced Graphene Oxide (RGO) using hydrazine monohydrate. Thin films of GO and RGO were also deposited on sodalime glass substrate using spray pyrolysis technique (SPT). The samples were characterized using Fourier Transform Infrared (FTIR) spectroscopy, Scanning Electron Microscopy (SEM) with Energy Dispersive X-Ray (EDS) facility attached to it, UV-Visible Spectrometry and Four-Point probe. The FTIR spectra showed the addition of oxygen functionality groups in GO while such groups was drastically reduced in RGO. SEM micrograph of GO thin film showed a porous sponge-like structure while the micrograph of RGO thin film showed evenly distributed and well connected graphene structure. The EDX spectrum of RGO showed that there was decrease in oxygen content and increase in carbon content of RGO when compared to GO. The optical analysis of the GO and RGO thin films gave a direct energy bandgap of 2.7 eV and 2.2 eV respectively. The value of sheet resistance of GO and RGO films was determined to be 22.9 × 10 6 Ω/sq and 4.95 × 10 6 Ω/sq respectively.

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Section: Film Depositionmentioning

confidence: 99%

Synthesis and Characterization of Graphene Oxide and Reduced Graphene Oxide Thin Films Deposited by Spray Pyrolysis Method

Eluyemi¹,

Eleruja²,

Adedeji³

et al. 2016

Graphene

102

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“…The decrease in film thickness may also be due to thermophoretic force which increases with increase in substrate temperature repelling the aerosols reaching the substrate surface [24]. Fig.…”

Section: Determination Of Band Gap Energymentioning

confidence: 99%

Physicochemical properties of sprayed V2O5 thin films: Effect of substrate temperature

Mane

Ganbavle

Gaikwad

et al. 2015

Journal of Analytical and Applied Pyrolysis

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“…The reactive zone is, in the case of film deposition, the space near the surface of the hot substrate (a few millimeters above the surface of the substrate), or the furnace heated chamber, in the case of powder synthesis. Figure 2 shows a diagram of the different stages at which the droplet is subjected as it approaches the hot substrate for two cases a fixed droplet size and speed, different (increasing from A to D, Figure 2a) temperature of the substrate and fixed substrate temperature and speed of different droplet sizes (decreasing droplet size from A to D, Figure 2b) [23,24]. At low temperature (large initial droplet size), the solvent within the droplet is not completely vaporized and the liquid droplet hits the substrate and upon contact with it vaporizes leaving a ring-shaped dry precipitate on the substrate (process A).…”

Section: Spray Pyrolysis As Materials Synthesis Techniquementioning

confidence: 99%

Spray Pyrolysis Technique; High-K Dielectric Films and Luminescent Materials: A Review

2018

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The spray pyrolysis technique has been extensively used to synthesize materials for a wide variety of applications such as micro and sub-micrometer dimension MOSFET´s for integrated circuits technology, light emitting devices for displays, and solid-state lighting, planar waveguides and other multilayer structure devices for photonics. This technique is an atmospheric pressure chemical synthesis of materials, in which a precursor solution of chemical compounds in the proper solvent is sprayed and converted into powders or films through a pyrolysis process. The most common ways to generate the aerosol for the spraying process are by pneumatic and ultrasonic systems. The synthesis parameters are usually optimized for the materials optical, structural, electric and mechanical characteristics required. There are several reviews of the research efforts in which spray pyrolysis and the processes involved have been described in detail. This review is intended to focus on research work developed with this technique in relation to high-K dielectric and luminescent materials in the form of coatings and powders as well as multiple layered structures.

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Methods of simulating thin film deposition using spray pyrolysis techniques

Cited by 50 publications

References 25 publications

Synthesis and Characterization of Graphene Oxide and Reduced Graphene Oxide Thin Films Deposited by Spray Pyrolysis Method

Synthesis and Characterization of Graphene Oxide and Reduced Graphene Oxide Thin Films Deposited by Spray Pyrolysis Method

Physicochemical properties of sprayed V2O5 thin films: Effect of substrate temperature

Spray Pyrolysis Technique; High-K Dielectric Films and Luminescent Materials: A Review

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