MeV ion beam lithography of biocompatible halogenated Parylenes using aperture masks

Whitlow, Harry J.; Norarat, Rattanaporn; Roccio, Marta; Jeanneret, Patrick; Guibert, Edouard; Bergamin, M.; Fiorucci, G.; Homsy, Alexandra; Laux, Edith; Keppner, H.; Senn, Pascal

doi:10.1016/j.nimb.2014.10.024

Cited by 3 publications

(2 citation statements)

References 13 publications

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“…This allowed for release of fluorescent molecules (fluorescine), used as reporters in these studies. In addition, nanostructurization methods such as localized irradiations of Parylene-coated surfaces passed biocompatibility testing with an auditory neuron survival assay, suggesting that such technologies might be used for precise local etching of a parylene-coated surface to create wells or nanopores for controlled release of growth factors ( 17 ).…”

Section: Wp2—nanofunctionalization Of the Electrode Array Surfacementioning

confidence: 99%

NANOCI—Nanotechnology Based Cochlear Implant With Gapless Interface to Auditory Neurons

Senn

Roccio

Hahnewald

et al. 2017

Otology &Amp; Neurotology

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Cochlear implants (CI) restore functional hearing in the majority of deaf patients. Despite the tremendous success of these devices, some limitations remain. The bottleneck for optimal electrical stimulation with CI is caused by the anatomical gap between the electrode array and the auditory neurons in the inner ear. As a consequence, current devices are limited through 1) low frequency resolution, hence sub-optimal sound quality and 2), large stimulation currents, hence high energy consumption (responsible for significant battery costs and for impeding the development of fully implantable systems). A recently completed, multinational and interdisciplinary project called NANOCI aimed at overcoming current limitations by creating a gapless interface between auditory nerve fibers and the cochlear implant electrode array. This ambitious goal was achieved in vivo by neurotrophin-induced attraction of neurites through an intracochlear gel-nanomatrix onto a modified nanoCI electrode array located in the scala tympani of deafened guinea pigs. Functionally, the gapless interface led to lower stimulation thresholds and a larger dynamic range in vivo, and to reduced stimulation energy requirement (up to fivefold) in an in vitro model using auditory neurons cultured on multi-electrode arrays. In conclusion, the NANOCI project yielded proof of concept that a gapless interface between auditory neurons and cochlear implant electrode arrays is feasible. These findings may be of relevance for the development of future CI systems with better sound quality and performance and lower energy consumption. The present overview/review paper summarizes the NANOCI project history and highlights achievements of the individual work packages.

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Section: Wp2—nanofunctionalization Of the Electrode Array Surfacementioning

confidence: 99%

NANOCI—Nanotechnology Based Cochlear Implant With Gapless Interface to Auditory Neurons

Senn

Roccio

Hahnewald

et al. 2017

Otology &Amp; Neurotology

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“…5d shows that very small droplets (<5 lm) can be coated. PPX on liquid represents a real packaging layer in a way that a solid interface is created allowing subsequent MEMS processing, such as metallization [3], patterning by photolithography, ion-beam implantation and structuration [10], or laser induced patterning [11] as on any solid thin-film. Furthermore, PPX is a chemically stable, biocompatible, and mechanically resistant material [12].…”

Section: Applications Of Lpcvd Ppx-based Solid On Liquid Depositionmentioning

confidence: 99%

Solid on liquid deposition, a review of technological solutions

Homsy

Laux

Jeandupeux

et al. 2015

Microelectronic Engineering

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a b s t r a c tSolid-on-liquid deposition (SOLID) techniques are of great interest to the MEMS and NEMS (Micro-and Nano Electro Mechanical Systems) community because of potential applications in biomedical engineering, on-chip liquid trapping, tunable micro-lenses, and replacements of gate oxides. However, depositing solids on liquid with subsequent hermetic sealing is difficult because liquids tend to have a lower density than solids. Furthermore, current systems seen in nature lack thermal, mechanical or chemical stability. Therefore, it is not surprising that liquids are not ubiquitous as functional layers in MEMS and NEMS. However, SOLID techniques have the potential to be harnessed and controlled for such systems because the gravitational force is negligible compared to surface tension, and therefore, the solid molecular precursors that typically condense on a liquid surface will not sediment into the fluid. In this review we summarize recent research into SOLID, where nucleation and subsequent cross-linking of solid precursors results in thin film growth on a liquid substrate. We describe a large variety of thin film deposition techniques such as thermal evaporation, sputtering, plasma enhanced chemical vapor deposition used to coat liquid substrates. Surprisingly, all attempts at deposition to date have been successful and a stable solid layer on a liquid can always be detected. However, all layers grown by non-equilibrium deposition processes showed a strong presence of wrinkles, presumably due to residual stress. In fact, the only example where no stress was observed is the deposition of parylene layers (poly-para-xylylene, PPX). Using all the experimental data analyzed to date we have been able to propose a simple model that predicts that the surface property of liquids at molecular level is influenced by cohesion forces between the liquid molecules. Finally, we conclude that the condensation of precursors from the gas phase is rather the rule and not the exception for SOLID techniques.

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Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film

Romanenko

Lavrentiev

Borodkin

et al. 2023

Nuclear Instruments and Methods in Physics Research Section B:

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MeV ion beam lithography of biocompatible halogenated Parylenes using aperture masks

Cited by 3 publications

References 13 publications

NANOCI—Nanotechnology Based Cochlear Implant With Gapless Interface to Auditory Neurons

NANOCI—Nanotechnology Based Cochlear Implant With Gapless Interface to Auditory Neurons

Solid on liquid deposition, a review of technological solutions

Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film

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