Micro-beamer based on MEMS micro-mirrors and laser light source

Abstract

This paper presents a complete portable laser-based projection system using two one-dimensional magnetic actuated MEMS linear scanning micro-mirrors. Dedicated high speed electronics was developed to drive the MEMS, detect the mirror scanning position at any time and synchronize the two mirrors and the laser pulsation. The achieved projection system head is 3 cm 3 and is able to project static images and videos with projection size of 50 cm diagonal at 50 cm distance with 32x32 px resolution, the resolution is only limited by current optical setup. The circuit building blocks itself can project image with resolution up to QVGA (320x240 px), suitable for information display applications.

Position encoding and phase control of resonant MOEMS mirrors

“…1a are used in bar-code scanners [1], miniaturized spectrometers [2], light barriers [3], and other applications. 2D-scanning mirrors are at the core of different projection applications [4,5].…”

Design rules for dense and rapid Lissajous scanning

“…Controlled laser beam steering satisfying the Lissajous trajectory has been widely used in many optical imaging systems over the last decades due to the advantages of the Lissajous trajectory, such as single-tone spectrum 1 and high-precision angle measurement 2 . Its application ranges from advanced optical microscopy 3 , multiphoton laserscanning microscopy 4 , atomic force microscopy 5 , optical coherence tomography imaging 6 , and Fourier transform infrared spectroscopy 7 to multimedia optical devices 8,9 . This kind of application requires a Lissajous scanner with very high spatial resolution 10 and low time parameters, such as frame rate.…”

Atomic force microscopy analyses on metallic thin films for optical MEMS

“…The optical MEMS are a category of MEMS devices that are combining the optical, mechanical, and electronic properties in a single device. They are used in the manufacture of optical sensors, attenuators, micro-lenses, micro-mirrors, displays and so on [2][3][4][5]. Aluminum [6,7], gold [8,9] and silver [10,11] are one of the most used materials for manufacturing optical MEMS due to their physical, chemical, mechanical, and optical properties.…”