Micro-deformation of flexible substrate for electronic devices during handling prior to lithography patterning

Yakimets, Iryna; Barink, M.; Goorhuis, M.; Giesen, Peter; Furthner, François; Meinders, Erwin R.

doi:10.1016/j.mee.2009.08.030

Cited by 11 publications

(10 citation statements)

References 14 publications

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“…The second effect of temperature elevation on the polymeric substrates is a reduced dimensional stability due to a high coeffi cient of thermal expansion, even for biaxially oriented and thermally stabilized foils. [ 88 ] The dimensional stability and waviness of the foils can be improved by a bond-debond approach, temporarily laminating and fl attening the foil to a carrier (e.g., Si or glass). These foilon-carriers supply a stable platform for foil processing, but many new variables are introduced (e.g., bowing) and need to be studied and tuned.…”

Section: Progress Reportmentioning

confidence: 99%

Fabrication of Transistors on Flexible Substrates: from Mass‐Printing to High‐Resolution Alternative Lithography Strategies

2012

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In this report, the development of conventional, mass-printing strategies into high-resolution, alternative patterning techniques is reviewed with the focus on large-area patterning of flexible thin-film transistors (TFTs) for display applications. In the first part, conventional and digital printing techniques are introduced and categorized as far as their development is relevant for this application area. The limitations of conventional printing guides the reader to the second part of the progress report: alternative-lithographic patterning on low-cost flexible foils for the fabrication of flexible TFTs. Soft and nanoimprint lithography-based patterning techniques and their limitations are surveyed with respect to patterning on low-cost flexible foils. These show a shift from fabricating simple microlense structures to more complicated, high-resolution electronic devices. The development of alternative, low-temperature processable materials and the introduction of high-resolution patterning strategies will lead to the low-cost, self-aligned fabrication of flexible displays and solar cells from cheaper but better performing organic materials.

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Section: Progress Reportmentioning

confidence: 99%

Fabrication of Transistors on Flexible Substrates: from Mass‐Printing to High‐Resolution Alternative Lithography Strategies

2012

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“…PEN and PET have been widely employed for manufacturing flexible electronics, and these substrates are prone to non-linear deformations induced by heat, moisture, and mechanical stress 7,8 . Previous research has shown that mask-based lithography may be successfully employed for manufacturing transistors on plastic foils temporarily laminated on top of a rigid carrier 1 .…”

Section: Introductionmentioning

confidence: 99%

“…Linear deformations of the substrate would be relatively easy to account for in mask-based lithography by simply changing the magnification of the projected image, or the projected pattern. However, on plastic substrates shrinkage and expansion of the substrate could occur at the same time and on the same foil depending on the monitored direction, a result of foil anisotropy 7 . It is thus difficult to cope with these deformations on the fly, and a good solution would be projection of the corrected image without a mask.…”

Section: Introductionmentioning

confidence: 99%

Advances in maskless and mask-based optical lithography on plastic flexible substrates

et al. 2009

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Organic flexible electronics is an emerging technology with huge potential growth in the future which is likely to open up a complete new series of potential applications such as flexible OLED-based displays, urban commercial signage, and flexible electronic paper. The transistor is the fundamental building block of all these applications. A key challenge in patterning transistors on flexible plastic substrates stems from the in-plane nonlinear deformations as a consequence of foil expansion/shrinkage, moisture uptake, baking etc. during various processing steps.Optical maskless lithography is one of the potential candidates for compensating for these foil distortions by in-situ adjustment prior to exposure of the new layer image with respect to the already patterned layers. Maskless lithography also brings the added value of reducing the cost-of-ownership related to traditional mask-based tools by eliminating the need for expensive masks. For the purpose of this paper, single-layer maskless exposures at 355 nm were performed on gold-coated poly(ethylenenaphthalate) (PEN) flexible substrates temporarily attached to rigid carriers to ensure dimensional stability during processing. Two positive photoresists were employed for this study and the results on plastic foils were benchmarked against maskless as well as mask-based (ASML PAS 5500/100D stepper) exposures on silicon wafers.

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“…The second effect of temperature elevation on the polymeric substrates is a reduced dimensional stability due to a high coefficient of thermal expansion, even for biaxially oriented and thermally stabilized foils. [86] The dimensional stability and waviness of the foils can be improved by a bond-debond approach, temporarily laminating and flattening the foil to a carrier (e.g. Si or glass).…”

Section: Resolution Patterningmentioning

confidence: 99%

“…bowing) and need to be studied and tuned. [25,[86][87][88][89][90] Other bonding strategies developed are Electronics-on-Plastic by Laser Release (EPLaR) by Philips Research, [91] and Flexible Universal Plane for Display (FlexUPD) by ITRI. [92] In EPLaR, PI is coated on display glass as used in TFT-LCD processing plants.…”

Section: Resolution Patterningmentioning

confidence: 99%

Alternative lithography strategies for flexible electronics

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Micro-deformation of flexible substrate for electronic devices during handling prior to lithography patterning

Cited by 11 publications

References 14 publications

Fabrication of Transistors on Flexible Substrates: from Mass‐Printing to High‐Resolution Alternative Lithography Strategies

Fabrication of Transistors on Flexible Substrates: from Mass‐Printing to High‐Resolution Alternative Lithography Strategies

Advances in maskless and mask-based optical lithography on plastic flexible substrates

Alternative lithography strategies for flexible electronics

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