Micro device mould fabrication based on two-photon polymerization and electroforming

Abstract

A novel method of the micro device mould fabrication is reported, which combine the femtosecond two-photon polymerization and micro electroforming. As example of the results, a 2×2 micro lens array (MLA) with diameter of 10ȝP and a micro gear are fabricated using S-3 photo resist by twophoton polymerization, which use an alternative annular scanning mode with continuous variable layer space after parameter optimization to achieve good surface appearance. Then the MLA and the micro gear are electroformed to obtain nickel mould. Compared to the conventional method, this work provides an alternative, fast and effective processing method for the fabrication of micro device mould that requires arbitrary shape with high surface quality and small scale.

Particle size dependence of the laser microfabrication of gold nanoparticles dispersed in polymer resists

“…In conventional laser processing, it is common to use a laser with a high power (average power output of 100 W) and a high pulse rate (peak power output of 10 MW per pulse), such as YAG lasers [6,7] and excimer lasers [8,9]. In laser microfabrications, 3D microfabrication using a femtosecond laser [10][11][12] and a multiphoton absorption polymerization using the field enhancement from nanomaterials [13] were reported. In laser fabrication using Au nanoparticles dispersed in a polymer film, a microscale channel and hole with a high aspect ratio can be processed using a laser with low power output, and it is not necessary to include a photolithography step or use poisonous reagents or gases.…”