Micro devices integration with large-area 2D chip-network using stretchable electroplating copper spring

Sung, Wei-Lun; Lai, Wei-Sheng; Chen, Chih-Chung; Huang, Keliang; Fang, Weileun

doi:10.1109/memsys.2014.6765846

Cited by 5 publications

(5 citation statements)

References 10 publications

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“…After that, the splitting trenches (by dicing saw) were used to separate each node. Detailed process steps are explained in [20]. Finally, as shown in figure 3(g), the chip network was ready to be stretched for large-area deployment.…”

Section: Fabrication Process and Resultsmentioning

confidence: 99%

“…Thus, this study extends the concept in [20] to design and implement a chip network integrated with functional devices. Electroplated copper is chosen to act as the stretchable spring because of its mechanical and electrical properties.…”

Section: Introductionmentioning

confidence: 90%

“…To meet the requirements of various innovative larger-area electronics applications, one of the challenges is incorporating multifunctionality, flexibility, lower cost, and easier integration with conventional electronics and MEMS devices. One way to achieve these goals is to use stretchable springs to construct a chip network with interconnected functional devices and spread out the functional devices over a larger surface [11][12][13][14][15][16][17][18][19][20]. Thus, the coverage area of the chip network can be expanded, and the functional devices are discretized.…”

Section: Introductionmentioning

confidence: 99%

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Development of a large-area chip network with multidevice integration using a stretchable electroplated copper spring

Sung

Chen²,

Huang³

et al. 2015

J. Micromech. Microeng.

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This study designed and implemented the multidevice integration of a flexible large-area chip network using a stretchable electroplated copper spring. The functional devices are directly implemented and integrated on the nodes of a 2D chip network distribution, and the nodes are mechanically and electrically connected to surrounding nodes by stretchable copper springs. The springs can stretch and expand the distance between functional devices by several orders of magnitude to construct a large-area chip network with interconnected devices. The advantages of this approach are that (1) the existing and mature process technologies and materials for semiconductors in large-area applications are used, (2) stretchable electroplated copper springs with larger failure strain and good conductivity act as both mechanical and electrical connections between nodes, (3) rigid nodes act as hubs for device implementation and integration with microfabrication processes, and (4) the chip network can be applied to 2D curved (spherical) surfaces for flexible electronics. In application, the proposed expandable chip network using stretchable springs with integration of various devices (such as proximity and temperature sensors and light-emitting diode (LED) chips) has been successfully implemented and tested. The results show the chip network with integrated sensors performs as expected on a 2D plane distribution as verified by measurements. Moreover, LED chips have been integrated as an example to show that the proposed design can be used for flexible electronics applications.

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Section: Fabrication Process and Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 90%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Development of a large-area chip network with multidevice integration using a stretchable electroplated copper spring

Sung

Chen²,

Huang³

et al. 2015

J. Micromech. Microeng.

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“…However, it is challenge to integrate these technologies with traditional semiconductor/MEMS processes/devices. Thus, this study extends the concept in [10] to design a flexible PDMS-fiber integrated with multi devices scheme. The PDMS-fiber provides solid nodes for the implementation and integration of micro devices.…”

Section: Introductionmentioning

confidence: 81%

Micro devices integration with stretchable spring embedded in long PDMS-fiber for flexible electronics

Sung

Cheng

Fang

2015

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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This study presents a PDMS (Polydimethylsiloxane) fiber integrated with multi devices scheme using stretchable electroplating copper spring. Each device was located on the node and embedded in PDMS-fiber. Thus, devices are mechanically connected by PDMS-fiber and electrically connected by inner stretchable spring. Thus, large-area and flexible applications can be achieved. Advantages of this approach: (1) length magnification by stretchable spring; (2) thicker stretchable spring embedded in PDMS provides well mechanical and electrical characteristics;(3) node acts as a hub for devices implementation and integration; (4) partially stretched spring could reduce the resistance variation by external loads. A 6.2cm PDMS-fiber with sensors and LED is implemented using a 2.4cm node-spring components fabricated on 4-inch wafer. PDMS-fiber longer than 30cm can be achieved using different spring design. Partially stretched spring embedded in PDMS MEMS devices embedded in PDMS PDMS-fiber Node of PDMS-fiber Unstretched spring Partially stretched spring Length magnification PDMS-fiber 978-1-4799-7955-4/15/$31.00 ©2015 IEEE

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“…Another bridge pattern that can achieve high stretchability and strain insensitivity is the 2D spiral, which is characterized by a curve winding around a fixed point (Figure 3c). [181,182] The 2D spiral unwinds and straightens under stretching, and the spiral arm absorbs the stretching strain and ensures the islands are free of strain. [125] During the unwinding process, the spiral is only loaded by bending strain, which has a limited influence on the conductance of the bridge.…”

Section: Wwwadvelectronicmatdementioning

confidence: 99%

Design Strategies for Strain‐Insensitive Wearable Healthcare Sensors and Perspective Based on the Seebeck Coefficient

Xin

Zhou

Nesser

et al. 2022

Adv Elect Materials

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The limited effectiveness of medical examinations has triggered the demand for 24-h monitoring technology. Wearable healthcare sensors are a promising option because they are small, light, wireless, and biocompatible with the human body. [8][9][10][11][12][13][14][15] Moreover, as they can potentially be organized in clouds, they can easily be combined with artificial intelligence (AI) to realize inexpensive intelligent systems for disease diagnosis and prevention. [16,17] Figure 1 shows that wearable healthcare sensors are classified in two categories: physical and chemical. Physical sensors include strain, temperature, touch and tactile, and pressure sensors. Wearable strain sensors are primarily used to monitor motion, breathing frequency, and pulse. [34] They should be able to sustain large deformation to accommodate the substrate, while at the same time they should have a high gauge factor to ensure highprecision recognition of small strains. Temperature sensors can both monitor the body temperatures of people with fever and monitor anesthetized people, predict ovulation times, and evaluate wound/postoperative recovery. [35,36] Touch and tactile sensors are then used as an artificial skin to help disabled persons with tactile sensations. [37][38][39][40][41] Wearable pressure sensors are extensively used in professional sports to enhance athletic ability and monitor health. [42][43][44] In the healthcare, pressure sensors detect small perpendicular deformations triggered by pulse and voice. [45][46][47] Physical sensors can be combined with prostheses to achieve multiple functions and help disabled people with missing limbs.Chemical sensors are used for health monitoring and detecting important organic-inorganic molecules serving as potential disease indicators. The human body performs multiple functions via biochemical reactions based on inorganic and organic materials. The concentration stability of organicinorganic molecules, such as bacteria, viruses, and uric acid, is important for health. [48][49][50] For example, a reduction in skin hydration level can lead to eczema, acne, itching, and even cracking of the stratum corneum, which makes people suffer and look older. [51] Chemical sensors can be used to monitor health by detecting important organic or inorganic molecules and their reactions. Existing chemical sensors detect potential disease based on certain indicators, such as humidity, [23,[52][53][54][55][56][57][58] hydration, [59][60][61][62][63] transcutaneous oxygen, [7,[64][65][66][67][68] vitamin A/B/C/D, [3,4,[69][70][71][72][73] hydrogen peroxide, [74][75][76][77][78] arrhythmia, [1,2] Large healthcare markets have been created in highly developed economies to improve the quality of life. Wearable healthcare sensors are attracting considerable interest because of their 24 h real-time monitoring capability, which make them useful in the detection of potential diseases. To guide the diagnosis, these sensors are designed to monitor various physical (e.g., pressure, temperature, strain, touch, bi...

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Micro devices integration with large-area 2D chip-network using stretchable electroplating copper spring

Cited by 5 publications

References 10 publications

Development of a large-area chip network with multidevice integration using a stretchable electroplated copper spring

Development of a large-area chip network with multidevice integration using a stretchable electroplated copper spring

Micro devices integration with stretchable spring embedded in long PDMS-fiber for flexible electronics

Design Strategies for Strain‐Insensitive Wearable Healthcare Sensors and Perspective Based on the Seebeck Coefficient

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