2020
DOI: 10.3390/s20226617
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Micro Electrochemical Milling of Micro Metal Parts with Rotating Ultrasonic Electrode

Abstract: With the rapid development of MEMS, the demand for metal microstructure is increasing. Micro electrochemical milling technology (MECM) is capable of manufacturing micro metallic devices or components based on the principle of electrochemical anode dissolution. To improve the capacity of MECM, this paper presents a compound method named ultrasonic vibration-assisted micro electrochemical milling technology (UA-MECM). Firstly, the simulation and mathematical model of UA-MECM process is established to explain the… Show more

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Cited by 9 publications
(4 citation statements)
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“…Mitchell-Smith et al produced different groove geometries by optimizing the bottom structure of a metallic nozzle to change current density distribution [ 10 ]. Liu et al proposed a method of ultrasonic vibration-assisted electrochemical milling, which was helpful to improve the machined surface quality, and a three-dimensional structure with the total depth of 300 μm was machined [ 11 ]. Liu and Qu analyzed the anodic polarization curves of TB6 in NaNO 3 solution and the effect of current density on the morphology, and grooves and flat surfaces were machined successfully by electrochemical milling [ 12 ].…”
Section: Introductionmentioning
confidence: 99%
“…Mitchell-Smith et al produced different groove geometries by optimizing the bottom structure of a metallic nozzle to change current density distribution [ 10 ]. Liu et al proposed a method of ultrasonic vibration-assisted electrochemical milling, which was helpful to improve the machined surface quality, and a three-dimensional structure with the total depth of 300 μm was machined [ 11 ]. Liu and Qu analyzed the anodic polarization curves of TB6 in NaNO 3 solution and the effect of current density on the morphology, and grooves and flat surfaces were machined successfully by electrochemical milling [ 12 ].…”
Section: Introductionmentioning
confidence: 99%
“…It is related to selection of optimal conditions of dissolution under the small interelectrode gap (<100 µm). The scope of the conducted research includes especially: (1) explanation of the phenomena in interelectrode gap during dissolution [5]; (2) analysis and modification of electric current distribution on the workpiece surface [6,7]; (3) selection of optimal composition of electrolyte [8]; (4) technology development, i.e., simulation of machining or the tool shape/path design [9];…”
Section: Introductionmentioning
confidence: 99%
“…It is related to selection of optimal conditions of dissolution under the small interelectrode gap (<100 μm). The scope of the conducted research includes especially: (1) explanation of the phenomena in interelectrode gap during dissolution [ 5 ]; (2) analysis and modification of electric current distribution on the workpiece surface [ 6 , 7 ]; (3) selection of optimal composition of electrolyte [ 8 ]; (4) technology development, i.e., simulation of machining or the tool shape/path design [ 9 ]; (5) development of power suppliers and gap control strategy [ 10 ]; and (6) improvement of machining conditions by additional energy sources (i.e., ultrasonic vibrations [ 11 , 12 ]) or (7) integration with other technologies [ 13 ].…”
Section: Introductionmentioning
confidence: 99%
“…29 For electrochemical milling, Liu et al used rotating helical flat electrodes assisted by ultrasound to reduce the surface roughness from Ra 0.83 μm to Ra 0.26 μm. 30 Wu et al added B 4 C particles to the electrolyte to achieve the polishing effect by high-frequency cathode vibration. 31 To intensify the effect produced by vibration, the electrode structure is usually redesigned with discs, threads, ribbing, and other shapes.…”
mentioning
confidence: 99%