Micro electroforming of high-aspect-ratio metallic microstructures by using a movable mask

Zhu, Daiyin; Zeng, Yong

doi:10.1016/j.cirp.2008.03.092

Cited by 23 publications

(11 citation statements)

References 5 publications

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“…16,17 Conventionally, ECM uses a template (through mask ECM) to form microporous surface, which causes complications of the process, and also the size of the pores is limited by the template. 18,[19][20][21] In order to address this limitation, an advanced ECM process with no template was developed to prepare porous surfaces on stainless steel. The principle of the micropore formation and the characteristic of the microporous surfaces were investigated.…”

Section: Introductionmentioning

confidence: 99%

Formation of porous hydrophobic stainless steel surfaces by maskless electrochemical machining

Wei¹,

Wang²,

Liu³

et al. 2016

Surface Engineering

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Surface topography is an important feature, which directly affects the friction, corrosion and flow characteristics of a workpiece. In this study, a new approach was explored to produce a microporous structure by maskless electrochemical machining (ECM). A rough surface with a microporous structure was created on a stainless steel substrate, and the principle of the micropore formation was investigated. It was found that the microporosity could form, grow and interconnect when the potential of the anodic surface was higher than the pitting potential of the material. The electric field is an important factor, and the surface topography can be altered by changing the electrical parameters. The porous microstructure was observed by laser scanning confocal microscopy. The rough and porous surface, modified with 1-dodecanethiol, exhibits hydrophobic characteristics, with a static contact angle of 1378 for water droplets. This is a significant improvement in the wetting properties for stainless steels.

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Section: Introductionmentioning

confidence: 99%

Formation of porous hydrophobic stainless steel surfaces by maskless electrochemical machining

Wei¹,

Wang²,

Liu³

et al. 2016

Surface Engineering

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“…Noteworthy, in UV-LIGA, an epoxy-based negative photoresist such as SU-8 is used as a photo-resistant polymer. 34 , 35 , 40 , 41 On this basis, the target metal is deposited on the resisted area without a covered mask. Finally, the photoresist material is peeled off to obtain the final desirable structure.…”

Section: Mn Fabrication Methodsmentioning

confidence: 99%

“…34,39 The LIGA process consists of metal deposition on patterned substrates. 34,35,40,41 X-ray or UV irradiations are commonly used for pattern stabilization. Previous experiments have successfully applied specific materials such as PMMA as a sensitive polymer in the X-ray LIGA process.…”

Section: Mn Fabrication Methodsmentioning

confidence: 99%

Application of microneedle patches for drug delivery; doorstep to novel therapies

et al. 2022

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In the past decade, microneedle-based drug delivery systems showed promising approaches to become suitable and alternative for hypodermic injections and can control agent delivery without side effects compared to conventional approaches. Despite these advantages, the procedure of microfabrication is facing some difficulties. For instance, drug loading method, stability of drugs, and retention time are subjects of debate. Besides, the application of novel refining fabrication methods, types of materials, and instruments are other issues that need further attention. Herein, we tried to summarize recent achievements in controllable drug delivery systems (microneedle patches) in vitro and in vivo settings. In addition, we discussed the influence of delivered drugs on the cellular mechanism and immunization molecular signaling pathways through the intradermal delivery route. Understanding the putative efficiency of microneedle patches in human medicine can help us develop and design sophisticated therapeutic modalities.

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“…However, chemical etching is more adept at creating nanoscale structures than microscale structures. Electroforming is theoretically possible to generate metallic microstructures with a limitless aspect ratio [24] on a submillimeter scale [25][26][27], but its dependence on a mask mold remains challenging to manufacture, restricting its process flexibility. Nanoimprints can generate ultra-thin metallic nanostructures with a high aspect ratio and could be used as transparent electrodes for organic solar cells [28][29][30].…”

Section: Introductionmentioning

confidence: 99%

Elliptical vibration chiseling: a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface

Li,

Zhang,

Zheng

et al. 2024

Int. J. Extrem. Manuf.

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High-aspect-ratio metallic surface microstructures are increasingly demanded in breakthrough applications, such as high-performance heat transfer enhancement and surface plasmon devices. However, the fast and cost-effective fabrication of high-aspect-ratio microstructures on metallic surfaces remains challenging for existing techniques. This study proposes a novel cutting-based process, namely elliptical vibration chiseling (EV-chiseling), for the high-efficiency texturing of surface microstructures with an ultrahigh aspect ratio. Unlike conventional cutting, EV-chiseling superimposes a microscale elliptical vibration on a backward-moving tool. The tool chisels into the material in each vibration cycle to generate an upright chip with a high aspect ratio through material deformation. Thanks to the tool’s backward movement, the chip is left on the material surface to form a microstructure rather than falling off. Since one microstructure is generated in one vibration cycle, the process can be highly efficient using ultrafast (>1 kHz) tool vibration. A finite element analysis model is established to explore the process mechanics of EV-chiseling. Next, a mechanistic model of the microstructured surface generation is developed to describe the microstructures’ aspect ratio dependency on the process parameters. Then, surface texturing tests are performed on copper to verify the efficacy of EV-chiseling. Uniformed micro ribs with a spacing of 1~10 μm and an aspect ratio of 2~5 have been successfully textured on copper. Compared with the conventional EV-cutting that uses a forward-moving tool, EV-chiseling can improve the aspect ratio of textured microstructure by up to 40 times. The experimental results also verify the accuracy of the developed surface generation model of microstructures. Finally, the effects of elliptical trajectory, depth of cut (DoC), tool shape, and tool edge radius on the surface generation of micro ribs have been discussed.

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Micro electroforming of high-aspect-ratio metallic microstructures by using a movable mask

Cited by 23 publications

References 5 publications

Formation of porous hydrophobic stainless steel surfaces by maskless electrochemical machining

Formation of porous hydrophobic stainless steel surfaces by maskless electrochemical machining

Application of microneedle patches for drug delivery; doorstep to novel therapies

Elliptical vibration chiseling: a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface

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