Micro endeffector with micro pyramids and integrated piezoresistive force sensor

Arai, Fumihito; Andou, Daisuke; Nonoda, Y.; Fukuda, Toshio; Iwata, H.; Itoigawa, K.

doi:10.1109/iros.1996.571061

Cited by 18 publications

(8 citation statements)

References 11 publications

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“…Passive release depends on altering the features of the end effector, substrate or environment. Some examples of passive release include coating the substrate with gold (Miyazaki et al 2000), coating the end effector chemically (Kim et al 2008), surface roughening of microgrippers (Arai et al 1996), regulating the humidity rate of the medium (Yuli et al 2014) and controlling the pH value of the liquid environment (Dejeu et al 2009). However, these methods mostly depend on surface properties.…”

Section: Introductionmentioning

confidence: 99%

Piezo-actuated parallel mechanism for biological cell release at high speed

Avci

Hattori

Kamiyama

et al. 2015

Biomed Microdevices

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In this paper, a dynamic releasing approach is proposed for high-speed biological cell manipulation. A compact parallel mechanism for grasping and releasing microobjects is used to generate controllable vibration to overcome the strong adhesion forces between the end effector and the manipulated object. To reach the required acceleration of the end effector, which is necessary for the detachment of the target object by overcoming adhesion forces, vibration in the end effector is generated by applying sinusoidal voltage to the PZT actuator of the parallel mechanism. For the necessary acceleration, we focus on the possible range of the frequency of the PZT-actuator-induced vibration, while minimizing the amplitude of the vibration (14 nm) to achieve precise positioning. The effect of the air and liquid environments on the required vibration frequency for successful release is investigated. For the first time, release results of microbeads and biological cells are compared. Release of the biological cells with 100 % success rate suggests that the proposed active release method is an appropriate solution for adhered biological cells during the release task.

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Section: Introductionmentioning

confidence: 99%

Piezo-actuated parallel mechanism for biological cell release at high speed

Avci

Hattori

Kamiyama

et al. 2015

Biomed Microdevices

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“…The majority is based on monolithic elastic microstructures which are most of the time microcantilevers [1] coupled or not with a mechanical deformation amplifier : AFM based microforce sensors using two or four quadrants photodetectors [2] [3] or the interferometry principle [4], piezoresistive microforce sensors which use the variation of the piezoresistive layer resistance when a force is applied [5] [6], capacitive microforce sensors which make use of change in capacitance between two metal plates when their distance changes during force application [7] [8], piezoelectric microforce sensors which generate a voltage when they are stressed by a force [9], etc. Because maximum microstructure deformations are usually small, these sensors are mostly limited in range of force measurement but have a large frequency bandwidth.…”

Section: Introductionmentioning

confidence: 99%

Modeling and experimentation of a passive low frequency nanoforce sensor based on diamagnetic levitation

Abadie

Piat

Oster

et al. 2012

Sensors and Actuators A: Physical

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“…Arai et at. made a micro gripper for precise manip ulation [4]. His integrated piezo-resistive force sensor was fabricated by micro-machining techniques.…”

Section: Introductionmentioning

confidence: 99%

Implementation of force sensor with multi strain gauges for enhancing accuracy and precision

Kim

Ihn

Choi

et al. 2010

Proceedings of 2010 IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications

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A force sensor using strain gauges is widely used in many mechanical measuring systems. A method of measuring force and contact point using two gauges is available although it rather limited to extension of micro scale measurement. In order to overcome this limitation and to maximize a precision of the strain gauge sensor, sensor structure was optimized. Also, we used Kalman filtering for increasing an accuracy. It significantly increase the signal to noise ratio and stability of the sensor. This force sensor using strain gauges will be applied to diverse fields such as inspecting a micro system or manipulating small devices.

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Micro endeffector with micro pyramids and integrated piezoresistive force sensor

Cited by 18 publications

References 11 publications

Piezo-actuated parallel mechanism for biological cell release at high speed

Piezo-actuated parallel mechanism for biological cell release at high speed

Modeling and experimentation of a passive low frequency nanoforce sensor based on diamagnetic levitation

Implementation of force sensor with multi strain gauges for enhancing accuracy and precision

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