Micro-machining processes for microsystem technology

Abstract

By means of experiments it could determined that micro-machining processes as grinding, drilling and milling are a good addition to the established production technologies in micro technology. To machine hard and brittle materials grinding with diamond tools is well suitable, but the kinematics of the grinding process, as well as the process strategy has a significant influence on the machined surface quality and the chipping of the edges. The study of micro-machining processes showed, that micro cutting processes are not just a miniaturisation of the conventional cutting technology. The reduced tool stiffness of micro drills caused by the changes of geometry requires an adjustment of the complete drilling processes. Sharp cutting edges are an essential requirement for the fabrication of very small structures. So, using single edged micro milling cutters made of diamond significant smaller structures could be made compared to using conventional milling cutters made of tungsten carbide. Furthermore, acoustic emission sensors proved to be suitable for detecting the tool position after a change of the tool with a high accuracy.

Microreactor technology and process miniaturization for catalytic reactions—A perspective on recent developments and emerging technologies

“…In an attempt to fill the niche between macro-scale machine tools and the micro world, a novel five-axis micro milling machine has been developed for fabrication of micro-scale components (Bong-Bang et al, 2005). It has also been shown that scaling-down of machine-tool processes must consider kinematic effects that can potentially occur when a tool, such as a micro-grinder or micro-drill, contacts a micro-scale material component during the fabrication process (Denkena et al, 2006). These effects can impart undesired surface movement, which translates into a reduction of the machine resolution and overall quality of the machined surface.…”

Mechanical structuring, surface treatment and tribological characterization of steel mould inserts for micro powder injection moulding

“…Micro milling is proved to be a very cost effective machining technology for the micro structuring of lPIM mould inserts made not only from unalloyed steels but also from tool steels with a hardness of more than 700 HV (Denkena et al 2006;Fleischer et al 2005;Schmidt and Kotschenreuther 2005). Depending on the diameter of the milling tool smallest details in the range of a few 10 lm were successfully produced.…”

Influence of surface condition on wear behavior of μPIM mould inserts made of tool steel and cemented carbide

“…Today the most common processes for the production of micro mould inserts made from steel are micro milling, electrical discharge machining (EDM) and laser ablation (Denkena et al 2006;Fleischer et al 2005;Fleischer and Kotschenreuther 2007;Schmidt and Kotschenreuther 2005;Schulze et al 2010). Very often the obtainable surface quality isn't adequate for lPIM, because of burrs and grooves resulting from micro milling or rough and brittle recast layers resulting from EDM or laser ablation processes (Horsch et al 2005;Cusanelli et al 2004;Le Harzic et al 2005).…”