Silicon-based microfabrication of a novel chemical reactor (microreactor) having submillimeter flow channels with integrated heaters, and jlow and temperature sensors is described. The potential application of this reactor to partial-oxidation reactions is explored by using Pt-catalyzed NH, oxidation as a model reaction. Investigation of reactor behavior as a function of operating conditions shows that conversion and selectivity behavior of conventional laboratory reactors can be reproduced and demonstrates the feasibility of conducting chemical reactions in microfabricated systems. Ignitionextinction behavior is explored, along with high-temperature microreactor materials degradation. Potential applications and scale-up of microreactors are also discussed.

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