2009
DOI: 10.1007/s00170-009-2411-2
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Micro-manufacturing: research, technology outcomes and development issues

Abstract: Βεσιδεσ χοντινυινγ εφφορτ ιν δεϖελοπινγ ΜΕΜΣ−βασεδ mανυφαχτυρινγ τεχηνιθυεσ, λατεστ εφφορτ ιν Μιχρο−mανυφαχτυρινγ ισ αλσο ιν Νον−ΜΕΜΣ−βασεδ mανυφαχτυρινγ. Ρεσεαρχη ανδ τεχηνολογιχαλ δεϖελοπmεντ (ΡΤD) ιν τηισ φιελδ ισ ενχουραγεδ βψ τηε ινχρεασεδ δεmανδ ον mιχρο−χοmπονεντσ ασ ωελλ ασ προmισεδ δεϖελοπmεντ ιν τηε σχαλινγ δοων οφ τηε τραδιτιοναλ mαχρο−mανυφαχτυρινγ προχεσσεσ φορ mιχρο−λενγτη−σχαλε mανυφαχτυρινγ. Τηισ παπερ ηιγηλιγητσ σοmε ΕΥ φυνδεδ ρεσεαρχη αχτιϖιτιεσ ιν mιχρο/νανο−mανυφαχτυρινγ, ανδ γιϖεσ εξαmπλεσ… Show more

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Cited by 202 publications
(94 citation statements)
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“…Therefore, HPT processing plus post-HPT annealing provides an alternative processing route for the development of materials suitable for use in micro-forming. [1] Experiments were conducted on an Al-1% Mg alloy to evaluate the effect of introducing a rm anneal following HPT processing. This alloy had an initial annealed grain size of ∼ 400 µm which was refined to ∼ 200 nm with a high fraction of high-angle grain boundaries through processing by HPT at room temperature.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…Therefore, HPT processing plus post-HPT annealing provides an alternative processing route for the development of materials suitable for use in micro-forming. [1] Experiments were conducted on an Al-1% Mg alloy to evaluate the effect of introducing a rm anneal following HPT processing. This alloy had an initial annealed grain size of ∼ 400 µm which was refined to ∼ 200 nm with a high fraction of high-angle grain boundaries through processing by HPT at room temperature.…”
Section: Discussionmentioning
confidence: 99%
“…Non-silicon material-based micro-manufacturing is an emerging field that has attracted considerable research interest [1]. As demands on miniature/micro-metal products increase significantly, micrometal-forming becomes an attractive option in the manufacturing of these products due to its advantageous characteristics for mass production with controlled quality and low cost [2].…”
Section: Introductionmentioning
confidence: 99%
“…The LIGA is an acronym of a German word for lithography, electroforming, and moulding. In this process, high aspect ratios could be achieved based on the combination of synchrotron radiation lithography and galvanoforming [12][13][14][15][16][17][18]. Laser micro-machining is a non-lithographic fabrication process, in which a laser beam is emitted in narrow and well-defined wavelengths with high power that can remove materials such as fine particles and vapour from a substrate.…”
Section: Introductionmentioning
confidence: 99%
“…Since the laser can be precisely controlled dimensionally as well as directionally, it is most effective when it is used to selectively heat a highly located area, rather than bulk heating of an entire part [16]. Laser heating has been thought to be a promising alternative to existing technologies such as induction or conductive heating to achieve the potential of microforming at elevated temperatures [17], and has been utilised extensively in the microforming of various metals to produce high quality microparts [13,[18][19][20].…”
Section: Introductionmentioning
confidence: 99%