2022
DOI: 10.1364/josab.455702
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Micro-opto-electro-mechanical system based microcantilever sensor for biosensing applications

Abstract: The strain sensing action of a photonic integrated microcantilever induced by the binding of biomolecules such as antibodies and antigens is an important factor in biosensing applications. Since sensitivity is the key factor in sensor performance for early detection of any bio analyte, increasing the sensitivity of the photonic integrated microcantilever becomes more critical. This can be achieved by varying the geometry of the microcantilever. Two photonic integrated microcantilever configurations—stepped pro… Show more

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Cited by 7 publications
(2 citation statements)
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“…Where λ is the mean free path of the fluid, n is the boundary normal, τ is the viscous stress tensor, T W is the wall temperature, T F is the temperature of the fluid, μ is its viscosity, and ρ is its density. As for the slip coefficients, σ s is the viscous slip coefficient, σ T is the thermal slip coefficient, and ζ T is the temperature jump coefficient that can be defined by material properties, a v is the accommodation coefficient for tangential momentum and κ the thermal conductivity of fluid [29][30][31][32][33]. The slip coefficients are provided by equations ( 17)-( 19).…”
Section: Microfluidic Resultsmentioning
confidence: 99%
“…Where λ is the mean free path of the fluid, n is the boundary normal, τ is the viscous stress tensor, T W is the wall temperature, T F is the temperature of the fluid, μ is its viscosity, and ρ is its density. As for the slip coefficients, σ s is the viscous slip coefficient, σ T is the thermal slip coefficient, and ζ T is the temperature jump coefficient that can be defined by material properties, a v is the accommodation coefficient for tangential momentum and κ the thermal conductivity of fluid [29][30][31][32][33]. The slip coefficients are provided by equations ( 17)-( 19).…”
Section: Microfluidic Resultsmentioning
confidence: 99%
“…By observing the wavelength shift of the peak/valley in the output spectrum, the strength of the magnetic field is typically determined. Although these sensors have demonstrated excellent sensing capabilities, their output spectral visibility is typically low, and the Full Width at Half Maximum (FWHM) of the valley/peak is typically wide, which leads to a low measurement resolution of the magnetic field and limited measurement accuracy [8], [9]. MFSs are used to detect MF, which is a blend of iron with oil, water, or any liquid.…”
Section: Introductionmentioning
confidence: 99%