Micro power generator with high-performace polymer electret

Suzuki, Yuji; Edamoto, M.; Kasagi, Nobuhide; Kashiwagi, Kaori; Morizawa, Yoshitomi

doi:10.1109/ise.2008.4814034

Cited by 2 publications

(4 citation statements)

References 3 publications

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“…We have shown experimentally its ability to scavenge mechanical vibration energy without using an electret layer. After a precharge of the transducer at 6 V, the measurements have been performed in autonomous mode and the converted power is 61 nW, with external vibrations at 250 Hz and an acceleration amplitude of 0.25 g. The −3 dB bandwidth of the resonator [45] 2007 4100 25.9 15 ('electret like') 0.065 0.3 Suzuki et al [22] 2008 37 234 450 (electret) 0.28 2 × 10 −3 This work [27] 2008 250 66 8 0.061 6 Hoffmann [46] 2008 1460 30 50 3.8 4…”

Section: Discussionmentioning

confidence: 99%

“…If only a weak sinusoidal voltage is applied on C var , it exhibits a variation from 73 to 144 pF as shown in figure 13(a), which is very close to the expected values. Equation (22) gives a maximum relative error below 3.1%. During one mechanical cycle, the proof mass passes twice through the mean position, so the frequency of C var variation is consequently twice the mechanical vibration frequency.…”

Section: Dynamic Characterization Of the Capacitancementioning

confidence: 99%

“…Efficient piezoelectric devices need materials in the form of thin films which are not always compatible with a CMOS process. Electrostatic harvesters, such as those considered in this paper, have a rather lower power density and need an initial pre-charge to start unless they use an electret layer [19][20][21][22][23]. However, such systems are still very attractive since they can be fabricated in a silicon micromachined process compatible with CMOS and are suitable for miniaturization.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

Basset¹,

Galayko²,

Paracha³

et al. 2009

J. Micromech. Microeng.

214

148

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This paper presents a novel silicon-based and batch-processed MEMS electrostatic transducer for harvesting and converting the energy of vibrations into electrical energy without using an electret layer. Effective conversion from the mechanical-to-electric domains of 61 nW on a 60 M resistive load, under a vibration level of 0.25 g at 250 Hz, has been demonstrated. Rigorous analysis of the efficiency of the harvester is presented, covering issues related with mechanical and electrical operation. Various schemes for the conditioning electronics are discussed and the harvested power measurements using a dc/dc converter are explained in detail. The paper concludes with a comparison with previous electrostatic transducers based on a new simple factor of merit.

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Section: Discussionmentioning

confidence: 99%

Section: Dynamic Characterization Of the Capacitancementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

Basset¹,

Galayko²,

Paracha³

et al. 2009

J. Micromech. Microeng.

214

148

View full text Add to dashboard Cite

show abstract

“…Electrets are electrically charged dielectrics that are able to keep their charges for years. They have long been used in microphones, sensors [14], etc and have proved their suitability in electrostatic converters as a permanent polarization source that enables a direct mechanical-toelectrical conversion without charging and discharging cycles [15,16], greatly simplifying the power management circuit.…”

Section: Electrets and Electret-based Convertersmentioning

confidence: 99%

Semi-flexible bimetal-based thermal energy harvesters

Boisseau

Despesse

Monfray

et al. 2013

Smart Mater. Struct.

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This paper introduces a new semi-flexible device able to turn thermal gradients into electricity by using a curved bimetal coupled to an electret-based converter. In fact, a two-steps conversion is carried out: (i) a curved bimetal turns the thermal gradient into a mechanical oscillation that is then (ii) converted into electricity thanks to an electrostatic converter using electrets in Teflon®. The semi-flexible and low cost design of these new energy converters pave the way to mass production over large areas of thermal energy harvesters. Raw output powers up to 13.46µW per device were reached on a hot source at 60°C and forced convection. Then, a DC-to-DC flyback converter has been sized to turn the energy harvesters' raw output powers into a viable supply source for an electronic circuit (DC@3V). At the end, 10µW of directly usable output power were reached with 3 devices, which is compatible with Wireless Sensor Networks powering applications.

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Micro power generator with high-performace polymer electret

Cited by 2 publications

References 3 publications

A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

Semi-flexible bimetal-based thermal energy harvesters

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