Micro-sized Fourier spectrometer

Manzardo, O.; Pétremand, Y.; Herzig, Hans Peter; Noell, Wilfried; Rooij, Nico de

doi:10.1364/domo.2002.dtuc5

Cited by 17 publications

(12 citation statements)

References 1 publication

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“…[1] There are some applications based on optical microsystems which are under investigation as microspectrometers, [2,3] confocal microscope for sample analysis, [4] optical coherence tomography (OCT) for in-vivo cancer detection, [5][6][7][8] and laser microsurgery. [9] It is observed that most optical microsystems are based on MEMS scanners.…”

Section: Introductionmentioning

confidence: 99%

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Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications

Espinosa

Rabenorosoa

Clevy

et al. 2014

International Journal of Optomechatronics

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MEMS scanners are useful for medical applications as optical coherence tomography and laser microsurgery. Although widespread design of MEMS scanners have been presented, their behavior is not well known, and thus, their motions are not easily and efficiently controlled. This deficiency induces several difficulties (limited resolution, accuracy, cycle time, etc.), and to tackle this problem, this article presents the modeling of an ISC electrothermally actuated MEMS mirror and the experimental characterization for the piston motion. Modeling and characterization are important to implement the control. A multiphysic model is proposed, and an experimental validation is performed with a good correspondence for a voltage range from 0 V to 3.5 V with a maximum displacement up to 200 lm and with a relative tilting difference of 0.1 . The article also presents a simple and efficient experimental setup to measure a displacement in dynamic and static mode, or a mirror plane tilting in static mode.

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Section: Introductionmentioning

confidence: 99%

“…In-plane displacement presented in Refs. [2,3,[10][11][12] for 1 DoF, and Refs. [4,13] for 2DoF (X-Y).…”

Section: Introductionmentioning

confidence: 99%

Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications

Espinosa

Rabenorosoa

Clevy

et al. 2014

International Journal of Optomechatronics

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“…Recently, lower-resolution miniature spectrometers have become attractive because of new applications, expanding opportunities in a remarkable variety of disciplines and industries. 1 Miniaturization could make instruments and sensors easier to handle, faster, and cheaper. Such spectrometers have various applications, including color measurement, quality and process control, gas detection, and chemical analysis.…”

mentioning

confidence: 99%

“…The design concept and actuation principles are described in Ref. 1, and a diagram of the operation is shown in Ref. 3.…”

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confidence: 99%

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Miniature lamellar grating interferometer based on silicon technology

Manzardo¹,

Michaely²,

Schädelin³

et al. 2004

Opt. Lett.

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We present a lamellar grating interferometer realized with microelectromechanical system technology. It is used as a time-scanning Fourier-transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micromachining, particularly by silicon-on-insulator technology. For the first time to our knowledge, we measure the spectrum of an extended white-light source with a resolution of 1.6 nm at a wavelength of 400 nm and of 5.5 nm at 800 nm. The wavelength accuracy is better than 0.5 nm, and the inspected wavelength range extends from 380 to 1100 nm. The optical path difference maximum is 145 mm. The dimensions of the device are 5 mm 3 5 mm.Spectrometry is widely used in industry and research laboratories. There are many different methods that are used in a variety of fields. In particular, Fourier-transform spectroscopy is a powerful technique for investigating weak sources with high resolution. At present, an extended range of Fourier spectrometers is commercially available. However, high resolution involves an elevated degree of mechanism precision and therefore large size and high cost. Recently, lower-resolution miniature spectrometers have become attractive because of new applications, expanding opportunities in a remarkable variety of disciplines and industries.

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MEMS‐ andMOEMS‐Based Near‐Infrared Spectrometers

Antila

Tuohiniemi

Rissanen

et al. 2000

Encyclopedia of Analytical Chemistry

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The trend in near‐infrared (NIR) spectroscopy is to go toward on‐site, in‐field, on‐the‐go applications with calibration‐free instruments and off‐the‐shelf chemometrics software. Micro‐electro‐mechanical systems (MEMS) and micro‐opto‐electro‐mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low‐cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry–Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers.

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Micro-sized Fourier spectrometer

Cited by 17 publications

References 1 publication

Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications

Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications

Miniature lamellar grating interferometer based on silicon technology

MEMS‐ andMOEMS‐Based Near‐Infrared Spectrometers

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