Microactuators of thin film shape memory alloy on silicon

Abstract

Microns-thick sputtered films of TiNi shape memory alloy deposited on silicon substrates have been capable of forceful electrical actuation. Present devices are made to millimeter scale. Research under way concentrates on reducing component size to hundreds of microns. Combined with springs, orifices, and ports, these devices made miniature valves for pneumatic and fluid control. Design, fabrication, and flow characteristics of a valve of 0.25 cm3 in size are discussed. Other applications for this technology will also be addressed, including microswitches and movable micromirrors.