Microcantilever Array Pressure Measurement System for Biomedical Instrumentation

Qu, Wenchao; Islam, Syed K.; Mahfouz, Mohamed R.; Haider, Mohammad Rafiqul; To, Gary; Mostafa, Salwa

doi:10.1109/jsen.2009.2034134

Cited by 13 publications

(1 citation statement)

References 22 publications

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“…Nowadays, MEMS devices are fabricated using much more advanced semiconductor and IC fabrication technologies such as wet etching [3], photolithography [4] [5], reactive ion etching/deep reactive ion etching [6][7][8], plasma enhanced chemical vapor deposition [9,10], ion implantation [11], etc. A variety of MEMS devices have already been developed and commercialized in the last 20 years such as microreservoirs [12], micropump [13,14], micromixer [15], cantilever [16][17][18], rotors [19], microchannels [20,21], microvalve [22] and microsensors [23][24][25].…”

Section: Microelectromechanical Systems (Mems)mentioning

confidence: 99%

Surface micromachined MEMS variable capacitor with two-cavity for energy harvesting

Lin¹

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for their help and support during my research. I would also thank Jianxiong Zhu for his valuable help and support in this research project. I specially want to thank my parents Zhiqiang Lin and Aizhu Chen, my parents in law Yongfu Xie and Yingxia Wu for their encouragement, love and support throughout my life. Finally, I would thank my wife Hui Xie for her love and support all the time during my PhD study. Big thanks to her encouragement and company which keeps me moving forward. iii TABLE OF CONTENTS

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Section: Microelectromechanical Systems (Mems)mentioning

confidence: 99%

Surface micromachined MEMS variable capacitor with two-cavity for energy harvesting

Lin¹

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System Architecture and Design Considerations

Wang

Jiang

Chen

2013

CMOS IC Design for Wireless Medical and Health Care

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Low-power circuits for the wireless ligament balance measurement system in TKA

Chen

Zhang

Liu

et al. 2011

Analog Integr Circ Sig Process

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A low power system for the ligament balance measuring in Total Knee Arthroplasty is presented in this paper. The system consists two parts: a front-end Ligament Balance Measuring System (LBMS) which is inserted into the knee joint during the operation, and the display part. LBMS is comprised of a sensors array including eight precise force sensors, signal conditioning circuits that support up to 15 force sensors, a sub-threshold microprocessor, power circuits and a 433 MHz RF transceiver for data transmission. The force corresponding to its distribution is transmitted wirelessly and displayed in 3-D in real time with an accuracy of 0.049 N. The signal conditioning circuits, the sub-threshold 8 bit microprocessor and the application specific integrated circuits chip have been designed and fabricated in 0.18 lm CMOS process. The tested resolution is 60.1 lV pp (1.35 g) with ±100 mV pp input. The chip can operate under 1.2 to 3.6 V voltage supply for single battery application with 116-160 lA power consumption. The testing results of the microprocessor show that the leakage power is 46 nW and the dynamic power is 385 nW @ 165 kHz with operating voltage of 350 mV. The simulation results show that the power circuits can provide the supply voltage ranging from 0.3 V to 0.6 V for the sub-threshold microprocessor. Experimental results verified the system. Some clinical experiments will be carried out in the future.

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Microcantilever Array Pressure Measurement System for Biomedical Instrumentation

Cited by 13 publications

References 22 publications

Surface micromachined MEMS variable capacitor with two-cavity for energy harvesting

Surface micromachined MEMS variable capacitor with two-cavity for energy harvesting

System Architecture and Design Considerations

Low-power circuits for the wireless ligament balance measurement system in TKA

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