Microelectromechanical system-based electrochemical seismic sensors with an anode and a cathode integrated on one chip

Deng, Tao; Sun, Zhenguo; Li, G; Chen, J; Chen, D; Wang, J

doi:10.1088/1361-6439/27/2/025004

Cited by 15 publications

(9 citation statements)

References 9 publications

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“…In order to address these issues, He et al and Deng et al fabricated sensitive electrodes based on microfabrication. Although high-consistency sensitive electrodes were manufactured, multiple wafers were required and they cannot be properly aligned [ 17 , 18 , 19 ].…”

Section: Introductionmentioning

confidence: 99%

MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure

She

Wang

Chen

et al. 2021

Sensors

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This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer. Device design and numerical simulations were conducted to model the functionality of the three-electrode structure in detecting vibration signals with the key geometrical parameters optimized. The CAC integrated three-electrode structure was then manufactured by microfabrication, which demonstrated a simplified fabrication process in comparison with conventional four-electrode structures. Device characterization shows that the sensitivity of the CAC microseismometer was an order of magnitude higher than that of the CME6011 (a commercially available four-electrode electrochemical seismometer), while the noise level was comparable. Furthermore, in response to random vibrations, a high correlation coefficient between the CAC and the CME6011 (0.985) was located, validating the performance of the developed seismometer. Thus, the developed electrochemical microseismometer based on an integrated three-electrode structure may provide a new perspective in seismic observations and resource explorations.

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Section: Introductionmentioning

confidence: 99%

MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure

She

Wang

Chen

et al. 2021

Sensors

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“…He et al reported sensing units where several microfabricated layers of electrodes and insulation were stacked together, and due to poor alignment accuracies, the reported electrochemical microseismometers suffered from the key issue of low consistencies [20]. In order to reduce the challenges in manufacture and assembly, Deng et al and Huang et al, based on different methods of fabrication, developed sensing units with integrated anodes and cathodes [21][22][23]. Nevertheless, since two chips still needed to be manually aligned and assembled, they still suffered from poor consistencies.…”

Section: Introductionmentioning

confidence: 99%

MEMS-Based Electrochemical Seismometer with a Sensing Unit Integrating Four Electrodes

Liu

et al. 2021

Micromachines

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This paper presents a new process to fabricate a sensing unit of electrochemical seismometers using only one silicon–glass–silicon bonded wafer. By integrating four electrodes on one silicon–glass–silicon bonded wafer, the consistency of the developed sensing unit was greatly improved, benefiting from the high alignment accuracy. Parameter designs and simulations were carried out based on this sensing unit, which indicated that the sensitivities of the developed electrochemical seismometer decreased with the decrease in the number of flow holes in the sensing unit, and the initial stabilization time decreased gradually with the decrease in the thickness of the glass layer. Based on experimental results of four devices, the peak sensitivity was quantified as 5345.45 ± 43.78 V/(m/s) at 2 Hz, which proved high consistency of the fabricated electrochemical seismometer. In terms of the responses to random ground motions, high consistencies between the developed electrochemical seismometer and the commercial counterpart of CME6011 (R-sensors, Moscow, Russia) were found, where the developed electrochemical seismometer produced comparable noise levels to those of CME6011. These results validated the performance of the device and it may function as an effective tool for a variety of applications.

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“…In addition, with the introduction of MEMS technologies, the performances of the sensitive electrodes of electrochemical seismic sensors were greatly improved [ 7 , 8 , 9 , 10 , 11 ], which attracted increasingly more interests from researchers all over the world.…”

Section: Introductionmentioning

confidence: 99%

Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors

Wang

Chen

et al. 2021

Micromachines

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Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them unable to work as expected. This paper studied the temperature characteristics of electrochemical seismic sensors based on MEMS (micro–electro–mechanical systems), and analyzed the influences of the temperature effects on the open-loop and closed-loop amplitude-frequency curves. Most importantly, the temperature compensation circuits based on thermistors were developed, which effectively adjusted pole frequencies and sensitivity coefficients, and finally realized the real-time temperature compensation for both open-loop and closed-loop measurements for the first time. The results showed that in the temperature range of −10 °C ~ +40 °C, and with the 3 dB bandwidth range of 0.01 Hz ~ 40 Hz, the change of the maximum sensitivity was reduced from about 25 dB before temperature compensation to less than 2 dB after temperature compensation.

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Microelectromechanical system-based electrochemical seismic sensors with an anode and a cathode integrated on one chip

Cited by 15 publications

References 9 publications

MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure

MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure

MEMS-Based Electrochemical Seismometer with a Sensing Unit Integrating Four Electrodes

Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors

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