Microelectromechanical XNOR and XOR logic devices

Mita, Makoto; Ataka, Mitsuo; Toshiyoshi, Hiroshi

doi:10.1587/elex.10.20130187

Cited by 6 publications

(3 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In this section, we demonstrate one potential application of the studied device to perform 2-bits logics functions, such as NOR, XOR, and AND, dynamically using the shift in its first mode frequencies. Such devices have been the subject of increasing interest in recent years [32][33][34]. Here, the high motional current of a capacitively sensed resonator is taken as output HIGH at resonance.…”

Section: Application : 2-bit Logic Functionsmentioning

confidence: 99%

Adjustable static and dynamic actuation of clamped-guided beams using electrothermal axial loads

Alcheikh

Tella

Younis

2018

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

 A wide-range tunable resonator and high displacement actuators are demonstrated theoretically (Finite element) and experimentally by using electrothermally actuated MEMS clamped-guided arch beams with the flexibility of shifting and choosing the operating frequency range upon demand.  We demonstrated eight possibilities of new static and dynamic behavior resulting into different resonance frequencies and static displacement curves.  Resonators have been designed as clamped-guided microbeams with electrothermal actuators of U-shaped structures on the sides.  We experimentally demonstrated that the device can be used as a resonant logic gate, with active resonance tuning, showing fundamental 2-bit logic functions, such as AND,XOR, and NOR.

show abstract

Section: Application : 2-bit Logic Functionsmentioning

confidence: 99%

Adjustable static and dynamic actuation of clamped-guided beams using electrothermal axial loads

Alcheikh

Tella

Younis

2018

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

show abstract

“…In recent years, researchers have explored microelectrome chanical systems (MEMS) resonators for different applications such as sensors [1][2][3][4], actuators [5][6][7], filters [8][9][10], switches [11][12][13], memory [14][15][16] and logic gates [17][18][19][20]. There has been significant interest in using MEMS resonators par ticularly as digital computing devices due to their run time reprogramability and low energy consumption especially in the off state.…”

Section: Introductionmentioning

confidence: 99%

Multimode excitations for complex multifunctional logic device

Tella

Younis

2019

J. Micromech. Microeng.

View full text Add to dashboard Cite

The simplicity and prospect of energy efficiency of microelectromechanical systems (MEMS) resonatorbased computing devices have captivated considerable research interest in recent years. Hence, they are being explored for ultralow power computing machines, which are currently needed for internetofthings (IoT) applications. Recently, there have been successful demonstrations of fundamental logic gates. However, the realization of complex multifunctional logic devices that involve multiinput and multioutput lines are facing challenges, such as the interconnections between multiple resonators and the limited controllability of the operating frequency. In this study, we demonstrate a 1:2 Demux combinational logic device with improved energy efficiency using the multi vibration modes of a single MEMS resonator. The MEMS device consists of three connected inplane microbeams in the form of a Ushape structure. The actuation and modulation are based on electrostatic forces. The device shows actuation energy of 0.082 fJ and 0.91 fJ for output 1 and output 2, respectively, and switching energy per logic operation of 11.01 pJ for output 1 and 5.31 pJ for output 2. This indicates 75% decrease in switching energy per logic operation in comparison with the previously reported values for electrostatically actuated MEMS resonatorbased computing devices.

show abstract

“…A universal logic gate was demonstrated with multi-bit logic functions using a single parametrically excited resonator in [31]. Mita et al [32] demonstrated XNOR and XOR logic gates based on a single cantilever beam. Mahboob et al [33] reported 2-bit and multi-bit logic operations using a single electromechanical parametric resonator by encoding binary information as different oscillation frequencies.…”

Section: Introductionmentioning

confidence: 99%

A single MEMS resonator for reconfigurable multifunctional logic gates

Tella¹,

Alcheikh²,

Younis³

2018

J. Micromech. Microeng.

View full text Add to dashboard Cite

Despite recent efforts toward true electromechanical resonator-based computing, achieving complex logics functions through cascading micro resonators has been deterred by challenges involved in their interconnections and the large required array of resonators. In this work we present a single micro electromechanical resonator with two outputs that enables the realization of multifunctional logic gates as well as other complex logic operations. As examples, we demonstrate the realization of the fundamental 2-bit logic gates of OR, XOR, AND, NOR, and a half adder. The device is based on a compound resonator consisting of a clamped-guided electrostatically actuated arch beam that is attached to another resonant beam from the side, which serves as an additional actuation electrode for the arch. The structure is also provided with an additional electrothermal tuning capability. The logic operations are based on the linear frequency modulations of the arch resonator and side microbeam. The device is compatible with CMOS fabrication process and works at room temperature.

show abstract

Microelectromechanical XNOR and XOR logic devices

Cited by 6 publications

References 13 publications

Adjustable static and dynamic actuation of clamped-guided beams using electrothermal axial loads

Adjustable static and dynamic actuation of clamped-guided beams using electrothermal axial loads

Multimode excitations for complex multifunctional logic device

A single MEMS resonator for reconfigurable multifunctional logic gates

Contact Info

Product

Resources

About