2004
DOI: 10.1063/1.1691490
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Microfabricated alkali atom vapor cells

Abstract: We describe the fabrication of chip-sized alkali atom vapor cells using silicon micromachining and anodic bonding technology. Such cells may find use in highly miniaturized atomic frequency references or magnetometers. The cells consist of cavities etched in silicon, with internal volumes as small as 1 mm3. Two techniques for introducing cesium and a buffer gas into the cells are described: one based on chemical reaction between cesium chloride and barium azide, and the other based on direct injection of eleme… Show more

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Cited by 315 publications
(182 citation statements)
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“…The control unit includes 25 transimpedance amplifiers to amplify the signals from the photodiodes within the sensor heads and a 24-bit DAC system to record the data. Each sensor head contains a microfabricated vapor cell [13] with an internal volume of 1.5 mm × 1.5 mm × 1.5 mm, filled with 87 Rb and roughly 1 amagat of N 2 . The size of the cell defines the sensitive volume of the magnetometers.…”
Section: Design Of the Imaging Arraymentioning
confidence: 99%
“…The control unit includes 25 transimpedance amplifiers to amplify the signals from the photodiodes within the sensor heads and a 24-bit DAC system to record the data. Each sensor head contains a microfabricated vapor cell [13] with an internal volume of 1.5 mm × 1.5 mm × 1.5 mm, filled with 87 Rb and roughly 1 amagat of N 2 . The size of the cell defines the sensitive volume of the magnetometers.…”
Section: Design Of the Imaging Arraymentioning
confidence: 99%
“…These sources include pure metal 61,62 , alkali compounds 61 , wax pellets 63 , alkali azides 64 , and alkali-enriched glass 65 . Most are not suitable for UHV or result in poorly controlled, or limited lifetime, sources.…”
Section: Atom Source and Controlmentioning
confidence: 99%
“…The Micro-DAVLL has in its core a micro fabricated rubidium vapor cell developed by the NIST group 11,13 . The cell is fabricated by bonding glass wafers to both sides of a silicon wafer.…”
Section: Micro-davll: the Cell-magnet System And Shieldmentioning
confidence: 99%
“…1). The second DAVLL system presented (named Micro-DAVLL) uses a micro-fabricated vapor cell 5,11 , which allows further significant reduction of the overall system size and weight, at the expense of requiring internal heaters. Both of these systems have potential for space borne applications, where size, weight, and power are essential considerations.…”
Section: Introductionmentioning
confidence: 99%