2017
DOI: 10.1364/oe.25.016101
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Microfabricated microfluidic platforms for creating microlens array

Abstract: The paper presents a novel and economic manufacturing process for microlens arrays (MLAs). This process uses micromilling machining, PDMS casting, and hybrid bonding between a glass substrate and PDMS membrane to create a microfluidic chip which is used for manufacturing MLAs on a PDMS substrates. MLAs of various diameters were fabricated for experiments, including 1000 μm, 500 μm, and 200 μm. The sag height of the MLAs is easily adjusted by controlling the pressure inside the microchannel to deform the PDMS m… Show more

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Cited by 17 publications
(7 citation statements)
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“…PDMS casting was then used to create a nonplanar PDMS membrane ( Figure 5 d). Heterogeneous solvent bonding was used to bond the PDMS membrane on a hemispherical PMMA shell ( Figure 5 e) for use in a nonplanar microlens array (MLA) ( Figure 5 f) [ 23 ].…”
Section: Extended Nonplanar Fabrication Process For Pdms/pmma Chipmentioning
confidence: 99%
See 1 more Smart Citation
“…PDMS casting was then used to create a nonplanar PDMS membrane ( Figure 5 d). Heterogeneous solvent bonding was used to bond the PDMS membrane on a hemispherical PMMA shell ( Figure 5 e) for use in a nonplanar microlens array (MLA) ( Figure 5 f) [ 23 ].…”
Section: Extended Nonplanar Fabrication Process For Pdms/pmma Chipmentioning
confidence: 99%
“…The system included a sensor (PS100-10 Bar, Yalab, Taipei, Taiwan) to measure pressure within the microchannel, a manual syringe pump to push liquid into the microfluidic chip and to deform the PDMS membrane, and a microscope to record the deformation of the PDMS ( Figure 8 b). The key parameters to control the MLS was described in the previous article [ 23 ], and the diameter of each MLA in Figure 7 a is 2 mm.…”
Section: Extended Nonplanar Fabrication Process For Pdms/pmma Chipmentioning
confidence: 99%
“…Recently, the microfluidic manipulation technique has become a new candidate for fashioning optical lenses. In the fabrication of the MLA using the microfluidic manipulation technique, the curvature of the lenslets can be well controlled by harnessing surface tension or applying pressure to reshape the profile of microfluid in the mold [ 23 , 24 , 25 , 26 ]. Based on the characteristics of microfluidic technology, Long et al proposed the preparation of multi-focus MLA with uniform aperture on curved microfluidics with inclined sidewalls.…”
Section: Introductionmentioning
confidence: 99%
“…Based on this solvent bonding method, we can create hybrid ABS/PMMA microfluidic chips which provide a number of side benefits: (1) connectors can be embedded during 3D printing to eliminate the troublesome task of assembling tubing during the execution of experiments; and (2) channels on the PMMA side can be fabricated at micro/sub-micro/nanoscales without having to deal with current limitations pertaining to 3D printing resolution. [21][22][23][24][25] To demonstrate the benefits of the proposed bonding technique, two microfluidic devices were then fabricated: (a) a 3D SAR-based passive micromixer and (b) an integrated chip with a micro mixing system and double-emulsion generator.…”
Section: Introductionmentioning
confidence: 99%