Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
DOI: 10.1109/memsys.2000.838484
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Microfabricated tunable bending stiffness device

Abstract: This paper reports a device with tunable bending stiffness realized by microfabrication technology. Based on the newly proposed principles, two types of devices whose bending stiffness were controlled by electrostatic force and pneumatic force were fabricated. From the analysis and experiments, the feasibility of the proposed principles were confirmed and the performances of the prototyped devices were demonstrated.

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Cited by 19 publications
(6 citation statements)
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“…This study considers the use of variable stiffness as a beneficial functionality in its own right, however, the aforementioned review highlighted the use of Electro-Bonded Laminate (EBL) technology for variable stiffness. Tabatha et al [5] presented a variable bending stiffness concept using thin polyimide layers between nickel electrodes. Voltage increases the observed friction between layers, thus increasing bending resistance.…”
Section: Existing Literaturementioning
confidence: 99%
“…This study considers the use of variable stiffness as a beneficial functionality in its own right, however, the aforementioned review highlighted the use of Electro-Bonded Laminate (EBL) technology for variable stiffness. Tabatha et al [5] presented a variable bending stiffness concept using thin polyimide layers between nickel electrodes. Voltage increases the observed friction between layers, thus increasing bending resistance.…”
Section: Existing Literaturementioning
confidence: 99%
“…Usually, compliance is changed by adjusting the active length of a spring or the deflection point on a beam. Several groups have developed structure-controlled stiffness mechanisms [38][39][40], though none of them have been applied toward the development of autonomous dynamic legged locomotion systems.…”
Section: Variable Passive Compliant Actuatorsmentioning
confidence: 99%
“…When an external force is applied to the system, the sheets will only be able to be displaced if the friction force is low. If vacuum or electrostatic methods are used to keep the sheets together, 30,31 the stiffness will increase. Instead of changing the inertia, it is also possible to change the effective length of a compliant sheet, as in the Mechanical Impedance Adjuster.…”
Section: Scs -Structure Controlled Stiffnessmentioning
confidence: 99%