2011
DOI: 10.1016/j.jelechem.2011.09.002
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Microfabrication and characterization of cylinder micropillar array electrodes

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Cited by 38 publications
(50 citation statements)
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“…Cu and Ag) have been produced by electrodeposition on non-metallic substrates as boron-doped diamond [8]. Furthermore, arrays made of non-metallic microelectrode as diamond based material [8,[49][50][51], carbon based materials [52][53][54][55] Several thin metal or multiple metals layers (few tens of nm), deposited between the supporting substrate and the electrode material, have been explored to promote adhesion; Ta [58], Ti [24], Al [28,[59][60][61], Cr [60,62] or composite layer as Ti/Pt sandwich (30:50 nm) [45] and Ti/Ni (50:50 nm) [46,63] have been used as adhesive layer for Ir [24,25,58], Au [44][45][46]60,62] and Pt [59][60][61].…”
Section: Ii1a Micro-electrode Array Fabricationmentioning
confidence: 99%
See 1 more Smart Citation
“…Cu and Ag) have been produced by electrodeposition on non-metallic substrates as boron-doped diamond [8]. Furthermore, arrays made of non-metallic microelectrode as diamond based material [8,[49][50][51], carbon based materials [52][53][54][55] Several thin metal or multiple metals layers (few tens of nm), deposited between the supporting substrate and the electrode material, have been explored to promote adhesion; Ta [58], Ti [24], Al [28,[59][60][61], Cr [60,62] or composite layer as Ti/Pt sandwich (30:50 nm) [45] and Ti/Ni (50:50 nm) [46,63] have been used as adhesive layer for Ir [24,25,58], Au [44][45][46]60,62] and Pt [59][60][61].…”
Section: Ii1a Micro-electrode Array Fabricationmentioning
confidence: 99%
“…The adhesion layer needs to be selected carefully as it may also be the source of interference [63].…”
Section: Ii1a Micro-electrode Array Fabricationmentioning
confidence: 99%
“…Thus, it is possible to create nano-and microelectrodes and their arrays [18][19][20][21], including disks [20,22], bands [23,24] and 3D structures [25][26][27], and wire them either in parallel or individually [18,20]. On top of that, microfabrication techniques allow the cost-effective mass-production of microsensors that can be deployed in a vast number of applications.…”
Section: Introductionmentioning
confidence: 99%
“…MEMS technology allows for a more versatile design, enabling the fabrication of microelectrodes of different sizes, geometries and arrangements (del Campo et al 2014;Prehn et al 2011). In addition, microfabrication techniques allow for cost-effective massproduction of microsensors that may be used for a variety of applications.…”
Section: Introductionmentioning
confidence: 99%