Microfabrication techniques for chemical/biosensors

Hierlemann, Andreas; Brand, Oliver; Hagleitner, Christoph; Baltes, H.

doi:10.1109/jproc.2003.813583

Cited by 192 publications

(91 citation statements)

References 157 publications

(284 reference statements)

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“…The CNTs are then coated with an inorganic material that is suitable for chromatography, the CNTs are removed at elevated temperature in an oxidizing environment, and the plates are hydrated. Photolithography has been widely used in semiconductor chip manufacturing [15,16] and in microfluidics [17][18][19][20] including modern drug delivery [17,[21][22][23].…”

Section: Introductionmentioning

confidence: 99%

Atomic layer deposition of aluminum-free silica onto patterned carbon nanotube forests in the preparation of microfabricated thin-layer chromatography plates

Kanyal¹,

Jensen²,

Dadson³

et al. 2014

Journal of Planar Chromatography – Modern TLC

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SummaryWe describe the direct, conformal, atomic layer deposition (ALD) of silica onto carbon nanotubes (CNTs) in the microfabrication of thinlayer chromatography (TLC) plates. As before, these plates were prepared with zig-zag hedge and channel microstructures, with high aspect ratio, porous hedges. After ALD, scanning electron microscopy (SEM) showed an increase in the radius of the CNTs of 8-40 nm. X-ray photoelectron spectroscopy (XPS) showed that the plates were composed almost entirely of silicon and oxygen, without contamination of metals or other elements that might compromise chromatographic performance, e.g., aluminum. Time-of-flight secondary ion mass spectrometry confirmed the extremely low level of aluminum in the plates. The final TLC layer thickness was ca. 50 μm. Separations of a test mixture of dyes from CAMAG (Muttenz, Switzerland) on an uncoated silica plate under traditional, normal phase conditions gave efficiencies of 40,000-140,000 plates m −1 with migration distances ranging from 2 to 36 mm. A separation of two fluorescent dyes, eosin Y disodium salt and sulforhodamine B, on an amino silane-coated plate gave efficiencies of ca. 170,000 and 200,000 plates m −1 , with hR F values of 76 and 88, respectively. Run times on these new plates were much faster than on conventional TLC plates.

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Section: Introductionmentioning

confidence: 99%

Atomic layer deposition of aluminum-free silica onto patterned carbon nanotube forests in the preparation of microfabricated thin-layer chromatography plates

Kanyal¹,

Jensen²,

Dadson³

et al. 2014

Journal of Planar Chromatography – Modern TLC

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“…CMOS technology to chemical sensors is being employed increasingly, not only for achieving miniaturisation but also reducing the power dissipation and improving the signal-to-noise ratio and the sensor response characteristics. In particular, MEMS-based microheaters along with the associated electronics (smart sensors) are being widely used for gas sensors [26][27] . The influx of parasitic capacitances and cross-talk effects in smart chemical sensors can be reduced significantly by on-chip electronics and also on-chip analog-to-digital conversion helps generate stable sensor output.…”

Section: Chemical Sensorsmentioning

confidence: 99%

Complementary Metal Oxide Semiconductors Microelectromechanical Systems Integration

Saha¹,

Chaudhuri²

2009

DSJ

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A review of the integration of the complementry metal oxide semiconductors (CMOS) circuit with the microelectromechanical systems (MEMS) structures for sensing and RF applications has been presented. Specifically, the integrated mechanical sensors, chemical gas sensors, and biochemical sensors have been discussed. Application of MEMS as switches, varactors, and inductors and their integration in RF circuits has also been highlighted. The fabrication and design challenges for the CMOS-MEMS integration have been described. A new design methodology for integration of thermal effects in an integrated pressure sensor has been proposed.

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“…Nowadays, humidity sensors have been widely used in many kinds of electrical systems such as industrial monitoring systems, agricultural monitoring systems, weather systems, medical equipment, household appliances, and so on [2][3][4]. Owing to the development of micromachining technology, both the sizes and the performances of the sensors were improved while the costs become much lower [5].…”

Section: Introductionmentioning

confidence: 99%

A Surface Micromachined CMOS MEMS Humidity Sensor

Huang

Zhao

et al. 2015

Micromachines

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This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromachined humidity sensor were both improved. The package and test systems of the sensor were designed. According to the test results, the sensitivity of the sensor was 7 mV/%RH (relative humidity) and the linearity of the sensor was 1.9% at 20˝C. Both the sensitivity and linearity were not sensitive to the temperature but the curve of the output voltage shifted with the temperature. The hysteresis of the humidity sensor decreased from 3.2% RH to 1.9% RH as the temperature increased from 10 to 40˝C. The recovery time of the sensor was 85 s at room temperature (25˝C).

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Microfabrication techniques for chemical/biosensors

Cited by 192 publications

References 157 publications

Atomic layer deposition of aluminum-free silica onto patterned carbon nanotube forests in the preparation of microfabricated thin-layer chromatography plates

Atomic layer deposition of aluminum-free silica onto patterned carbon nanotube forests in the preparation of microfabricated thin-layer chromatography plates

Complementary Metal Oxide Semiconductors Microelectromechanical Systems Integration

A Surface Micromachined CMOS MEMS Humidity Sensor

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