Microgrooving of Germanium Wafers Using Laser and Hybrid Laser-Waterjet Technologies

Zhu, Hao; Wang, Jun; Li, Wei Yi; Li, Huaizhong

doi:10.4028/www.scientific.net/amr.1017.193

Cited by 7 publications

(7 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In laser water jet composite processing technology, as depicted in Figure 7, the material is softened through laser heating, which reduces its yield strength. Subsequently, the highpressure water jet impacts the heated material, causing shear forces and facilitating its removal [9,94]. Figure 8 shows a schematic diagram of laser-water jet equipment.…”

Section: Composite Processing 221 Laser-water Jet Composite Processin...mentioning

confidence: 99%

A Review of Femtosecond Laser Processing of Silicon Carbide

Wang,

Zhang,

Chen

et al. 2024

Micromachines

View full text Add to dashboard Cite

Silicon carbide (SiC) is a promising semiconductor material as well as a challenging material to machine, owing to its unique characteristics including high hardness, superior thermal conductivity, and chemical inertness. The ultrafast nature of femtosecond lasers enables precise and controlled material removal and modification, making them ideal for SiC processing. In this review, we aim to provide an overview of the process properties, progress, and applications by discussing the various methodologies involved in femtosecond laser processing of SiC. These methodologies encompass direct processing, composite processing, modification of the processing environment, beam shaping, etc. In addition, we have explored the myriad applications that arise from applying femtosecond laser processing to SiC. Furthermore, we highlight recent advancements, challenges, and future prospects in the field. This review provides as an important direction for exploring the progress of femtosecond laser micro/nano processing, in order to discuss the diversity of processes used for manufacturing SiC devices.

show abstract

Section: Composite Processing 221 Laser-water Jet Composite Processin...mentioning

confidence: 99%

A Review of Femtosecond Laser Processing of Silicon Carbide

Wang,

Zhang,

Chen

et al. 2024

Micromachines

View full text Add to dashboard Cite

show abstract

“…Finally, the quality of the cut is limited by variations of the focusing of the optics. These drawbacks constrain the material type and -geometry which can be cut [3][4][5], and require precise adjustments throughout the cutting process. To solve those issues the water jet-guided laser cutting process (WJGL) was proposed [6], where a laser beam is focused into and thereby coupled into a high-pressure water jet.…”

Section: Introduction and State Of The Artmentioning

confidence: 99%

“…These benefits allow the water jet-guided laser cutting process to be used for a wide range of applications, such as precise micro-machining [11][12][13], high-efficiency precision cutting of metals and composites [8,11,[13][14][15], ceramics [5], semiconductors [4,10] and other exotic materials [9].…”

Section: Introduction and State Of The Artmentioning

confidence: 99%

Correlation of signal feature importance and process parameters in water jet-guided laser cutting

Richter,

Braunmüller,

Pandiyan

et al. 2023

IOP Conf. Ser.: Mater. Sci. Eng.

View full text Add to dashboard Cite

Laser-based cutting can deliver high accuracy and speed during the process. However, there are still some technical challenges to be solved. First, the process itself requires precise focusing of the laser beam. When using continuous wave (CW)- or pulses in the μs- to ns-range for efficient materials removal, not only the targeted material volume is heated, but also the surrounding material due to heat diffusion. This decreases the quality of the cut. Coupling the light into a water-jet solves both issues: It ensures the delivery of focused light to the target surface, while cooling the affected material during processing. This work proposes a real-time monitoring system of the cutting process by exploiting unique physical phenomena related to the process. The water jet allows both the propagation of laser light towards the target while keeping it focused and the back-propagation of process light through the focusing system. This can be captured using suitable sensors, and saved using a data acquisition system. The acquired data can be used for process characterization using signal processing. In this work we demonstrate the direct correlation between different process parameters and statistical signal features. We show that reducing the signal to a few statistical features both in time and frequency by feature extraction does not reduce the information content, but instead makes it more robust to mis-classification while decreasing the classification time. It also opens up a wide range of future applications not only to process data, but also to control the process more precise.

show abstract

“…Mullick [ 16 ] established the analytical model of water-jet-assisted laser processing and found that 40% to 50% of the laser energy loss come from the vaporization of water. Zhu et al [ 17 ] experimentally studied the effects of nanosecond laser and hybrid laser water-jet technology on the processing performance of germanium microgrooves and also analyzed and discussed the effects of laser pulse energy, pulse overlap, and focal plane position on the groove geometry and heat. The research results show that hybrid laser water jet technology can produce narrow and deep microgrooves in the smallest heat-affected zone.…”

Section: Introductionmentioning

confidence: 99%

Study on the Influence of Surface Temperature Field of Aluminum Alloy Etched by Laser Water Jet Composite Machining

Chen

Liu

et al. 2020

Materials

View full text Add to dashboard Cite

This paper studies the compound effect of liquid medium and laser on the workpiece and analyses the law of material surface temperature change during the processing. Taking 7075-T6 aluminum alloy as the research object, the surface temperature field of aluminum alloy processed using water-jet-assisted laser machining under different process parameters was simulated using finite element software. In addition, the temperature field of the material surface was detected in real-time using the self-built water-jet-assisted laser machining temperature field detection system, and the processing results were observed and verified using an optical microscope, scanning electron microscope, and energy spectrum analyzer. The results show that when the water jet inflow angle is 45°, the heat-affected area of the material surface is the smallest, and the cooling effect of the temperature field of the material surface is better. Considering the liquidus melting point of 7075 aluminum alloys, it is concluded that the processing effect is better when the water jet velocity is 14 m·s−1, the laser power is 100 W, and the laser scanning speed is 1.2 mm·s−1. At this time, the quality of the tank is relatively good, there are no cracks in the bottom of the tank, and there is less slag accumulation. Compared with anhydrous laser etching, water-jet-assisted laser etching can reduce the problems of micro-cracks, molten slag, and the formation of a recast layer in laser etching and improve the quality of the workpiece, and the composition of the bottom slag does not change. This study provides theoretical guidance and application support for the selection and optimization of process parameters for water-jet-assisted laser etching of aluminum alloy and further enriches the heat transfer mechanism of multi-field coupling in the process of water-jet-assisted laser machining.

show abstract

Microgrooving of Germanium Wafers Using Laser and Hybrid Laser-Waterjet Technologies

Cited by 7 publications

References 15 publications

A Review of Femtosecond Laser Processing of Silicon Carbide

A Review of Femtosecond Laser Processing of Silicon Carbide

Correlation of signal feature importance and process parameters in water jet-guided laser cutting

Study on the Influence of Surface Temperature Field of Aluminum Alloy Etched by Laser Water Jet Composite Machining

Contact Info

Product

Resources

About