2008
DOI: 10.1016/j.sna.2007.10.057
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Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator

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Cited by 38 publications
(14 citation statements)
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“…High quality factors are generally required to achieve high sensitivity of the sensor (200-250 for the sense mode and 35000-45000 for the drive mode (Dong, et al, 2008)). Due to the phase shift introduced by the mechanical sensing element, a simple lead compensator needs to be included to stabilize the control loop.…”
Section: δ∑ Modulator Based Mems Gyroscope 51mentioning
confidence: 99%
See 1 more Smart Citation
“…High quality factors are generally required to achieve high sensitivity of the sensor (200-250 for the sense mode and 35000-45000 for the drive mode (Dong, et al, 2008)). Due to the phase shift introduced by the mechanical sensing element, a simple lead compensator needs to be included to stabilize the control loop.…”
Section: δ∑ Modulator Based Mems Gyroscope 51mentioning
confidence: 99%
“…Dong, et al, 2008), to form a band-pass Δ∑ modulator, which mirrors the CIDIFF structure with resonators as discussed in Chapter 3. A third order Δ∑ modulator based MEMS gyroscope with CIDIFF structure with resonator is shown in More Δ∑ modulator based MEMS gyroscope implementations can be found in a review paper (Kraft and Ding, 2009).…”
Section: δ∑ Modulator Based Mems Gyroscope 51mentioning
confidence: 99%
“…The feedback signal used for nulling the sense motion contains the angular velocity information, which can be extracted with a basic synchronous baseband demodulation circuit. When a digital output must be provided, the feedback signal can be oversampled and quantized with a coarse quantizer: in this case, the closed-loop sensing interface behaves as a (electromechanical) Σ∆ modulator (Dong et al, 2008;Petkov & Boser, 2005).…”
Section: Comb Fingers Actuatorsmentioning
confidence: 99%
“…Therefore during the past few years, gyroscopes in a closed loop controller have become so attractive. Recently, a closed loop control strategy based on delta sigma modulator has been proven to be beneficial which provides a high resolution digital output without any excess analog to digital converter [2][3][4].…”
Section: Introductionmentioning
confidence: 99%
“…Several architectures have been reported to date for gyroscope in closed loop controller [2,3,5,6]. In [2,5] sensing and controlling electrodes have been configured separately, but in [3,6] they have been shared by time-multiplexing.…”
Section: Introductionmentioning
confidence: 99%